Design and Manufacturing of Active Microsystems
Springer Berlin (Verlag)
978-3-642-26738-3 (ISBN)
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Professor Dr.-Ing. Dr.h.c. Jürgen Hesselbach (born 1949) is the President of the Technische Universität Braunschweig since January 2005 (re-elected in 2010) and the Head of the Institute of Machine Tools and Production Technology. In 2009 and 2010 he was the Chairman of the Presidential Committee of the Niedersächsische Technische Hochschule (NTH) and is now member of the Presidential committee. Additionally, he became the Head of the Landeshochschulkonferenz Niedersachsen (LHK) in 2011. His research activities are focussed on production automation, control systems and handling technology.
1. Introduction.- 2. Design and Construction.- 3. Guiding and Measuring in Active Microsystems.- 4. Manufacturing and Fabrication.- 5. Microassembly.- 6.Industrial Applications.
| Erscheint lt. Verlag | 21.3.2014 |
|---|---|
| Reihe/Serie | Microtechnology and MEMS |
| Zusatzinfo | XII, 444 p. |
| Verlagsort | Berlin |
| Sprache | englisch |
| Maße | 155 x 235 mm |
| Gewicht | 694 g |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| Technik ► Maschinenbau | |
| Schlagworte | magnetic microsystems • mechanical micromaching • Microactuators • microassembly • microelectroplating • micrometrology • micromotors • microrobots • microtribology • miniaturized handling devices • TCAD • Technical CAD • UV-depth lithography |
| ISBN-10 | 3-642-26738-6 / 3642267386 |
| ISBN-13 | 978-3-642-26738-3 / 9783642267383 |
| Zustand | Neuware |
| Haben Sie eine Frage zum Produkt? |
aus dem Bereich
