Design and Manufacturing of Active Microsystems
Springer Berlin (Verlag)
978-3-642-12902-5 (ISBN)
Professor Dr.-Ing. Dr.h.c. Jürgen Hesselbach (born 1949) is the President of the Technische Universität Braunschweig since January 2005 (re-elected in 2010) and the Head of the Institute of Machine Tools and Production Technology. In 2009 and 2010 he was the Chairman of the Presidential Committee of the Niedersächsische Technische Hochschule (NTH) and is now member of the Presidential committee. Additionally, he became the Head of the Landeshochschulkonferenz Niedersachsen (LHK) in 2011. His research activities are focussed on production automation, control systems and handling technology.
1. Introduction
2. Design and Construction
3. Guiding and Measuring in Active Microsystems
4. Manufacturing and Fabrication
5. Microassembly
6.Industrial Applications
Erscheint lt. Verlag | 10.3.2011 |
---|---|
Reihe/Serie | Microtechnology and MEMS |
Zusatzinfo | XII, 444 p. |
Verlagsort | Berlin |
Sprache | englisch |
Maße | 155 x 235 mm |
Gewicht | 816 g |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Maschinenbau | |
Schlagworte | magnetic microsystems • mechanical micromaching • Microactuators • microassembly • microelectroplating • micrometrology • micromotors • microrobots • microtribology • miniaturized handling devices • TCAD • Technical CAD • UV-depth lithography |
ISBN-10 | 3-642-12902-1 / 3642129021 |
ISBN-13 | 978-3-642-12902-5 / 9783642129025 |
Zustand | Neuware |
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