Levitation Micro-Systems

Applications to Sensors and Actuators

Kirill Poletkin (Autor)

Buch | Softcover

IX, 174 Seiten

2021 | 1st ed. 2021
Springer International Publishing (Verlag)
978-3-030-58910-3 (ISBN)

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This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

lt;b>Kirill Poletkin obtained his Ph.D. degree at Moscow Aviation Institute (Moscow State Aviation Technological University), Russia in 2007. Since 2016, he is a scientist at Karlsruhe Institute of Technology as a scientist. In 2020, he is also appointed as an assistant professor at Innopolis University. His research interest includes micro- and nano-scales electromechanical devices and processes of the energy transfer within these scales.

Introduction to levitation micro-systems.- Micro-fabrication techniques.- Analytical modelling.- Quasi-finite element modelling.- Inductive levitation micro-systems.- Hybrid levitation micro-systems.- Mechanical thermal noise in levitated micro-gyroscopes.

Erscheinungsdatum	20.11.2021
Reihe/Serie	Microsystems and Nanosystems
Zusatzinfo	IX, 174 p. 93 illus., 91 illus. in color.
Verlagsort	Cham
Sprache	englisch
Maße	155 x 235 mm
Gewicht	290 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
Schlagworte	analytical modelling • Electromagnetic Levitation • Inductive Levitation • Levitation Micro-Systems • Micro-Fabrication Techniques
ISBN-10	3-030-58910-2 / 3030589102
ISBN-13	978-3-030-58910-3 / 9783030589103
Zustand	Neuware