Levitation Micro-Systems
Applications to Sensors and Actuators
Seiten
2020
|
1st ed. 2021
Springer International Publishing (Verlag)
978-3-030-58907-3 (ISBN)
Springer International Publishing (Verlag)
978-3-030-58907-3 (ISBN)
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
lt;b>Kirill Poletkin obtained his Ph.D. degree at Moscow Aviation Institute (Moscow State Aviation Technological University), Russia in 2007. Since 2016, he is a scientist at Karlsruhe Institute of Technology as a scientist. In 2020, he is also appointed as an assistant professor at Innopolis University. His research interest includes micro- and nano-scales electromechanical devices and processes of the energy transfer within these scales.
Introduction to levitation micro-systems.- Micro-fabrication techniques.- Analytical modelling.- Quasi-finite element modelling.- Inductive levitation micro-systems.- Hybrid levitation micro-systems.- Mechanical thermal noise in levitated micro-gyroscopes.
Erscheinungsdatum | 29.12.2020 |
---|---|
Reihe/Serie | Microsystems and Nanosystems |
Zusatzinfo | IX, 174 p. 93 illus., 91 illus. in color. |
Verlagsort | Cham |
Sprache | englisch |
Maße | 155 x 235 mm |
Gewicht | 448 g |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Maschinenbau | |
Schlagworte | analytical modelling • Electromagnetic Levitation • Inductive Levitation • Levitation Micro-Systems • Micro-Fabrication Techniques |
ISBN-10 | 3-030-58907-2 / 3030589072 |
ISBN-13 | 978-3-030-58907-3 / 9783030589073 |
Zustand | Neuware |
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