Accuracy Enhancement Technologies for Micromachining Processes (eBook)

Preface 6
Acknowledgements 9
Contents 10
Editors and Contributors 11
Accuracy Improvement in Tool-Based Micromachining 14
1 Introduction 14
1.1 Accuracy Improvement 15
2 Tool-Based Micromachining 16
2.1 Micro Turning 16
2.2 Micro Drilling 16
2.3 Micro Milling 18
3 Process Criteria 18
4 Cutting Tool 20
4.1 Tool Fabrication 20
4.2 Tool Geometry 21
4.3 Tool Wear 21
4.4 Coating of Tool 22
4.5 Tool Deflection and Failure 22
5 Machining Parameters 23
5.1 Built-Up Edge Effects 23
5.2 Cutting Temperature 24
5.3 Cutting Fluids 24
6 Workpiece Characteristics 24
6.1 Material Structure 24
7 Cutting Phenomenon 25
7.1 Size Effect 25
7.2 Cutting Force 26
7.3 Heat Generation 26
7.4 Burr Formation 26
8 Plant Factors 27
9 Machine Tool Characteristics 27
9.1 Position Measurement and Process Monitoring 28
9.2 Vibration 28
10 Current and Future Challenges 29
10.1 Future Challenge 29
References 31
Strategies for Improving Performance of Ultrasonic Micromachining Process 35
1 Introduction 36
2 Basic Principle of Ultrasonic Micromachining (USMM) Process 37
3 Types of Ultrasonic Micromachining (USMM) Process 37
3.1 Stationary Ultrasonic Micromachining (USMM) 37
3.2 Rotary Ultrasonic Micromachining (RUSMM) 39
4 Strategies for Development of Ultrasonic Micromachining (USMM) System for Performance Improvement 39
4.1 Strategies for Stationary Ultrasonic Micromachining (USMM) 40
4.2 Strategies for Rotary Ultrasonic Micromachining (RUSMM) 41
5 Mode of Operation of Ultrasonic Micromachining (USMM) 41
5.1 USMM with Tool Vibration 42
5.2 USMM with Workpiece Vibration 42
6 Elements of USMM System 42
6.1 Power Supply 43
6.2 Transducer 43
6.3 Horn 44
6.4 Abrasive Slurry 44
6.5 Micro-Tool 45
6.6 Workpiece 46
7 Improvement in Machining Rate of Ultrasonic Micromachining (USMM) 46
7.1 Stationary Ultrasonic Micromachining (USMM) 47
7.2 Rotary Ultrasonic Micromachining (RUSMM) 48
8 Improvement in Geometrical Features of Ultrasonic Micromachining (USMM) 49
8.1 Stationary Ultrasonic Micromachining (USMM) 49
8.2 Rotary Ultrasonic Micromachining (RUSMM) 53
9 Future Scope of Research 54
10 Summary 54
References 55
Accuracy Improvement and Precision Measurement on Micro-EDM 58
1 Introduction 60
2 Process Mechanism of Micro Electrical Discharge Machining (µEDM) 61
2.1 Machining Parameters 63
2.2 Machine Setup Parameters 65
3 Different Variants of Micro Electrical Discharge Machining 66
3.1 Micro Wire Electrical Discharge Grinding (µWEDG) 66
3.2 Block Micro Electrical Discharge Grinding (B-µEDG) 66
3.3 Micro Electrical Discharge Drilling (µED-Drilling) 67
3.4 Reverse Micro Electrical Discharge Machining (R-µEDM) 68
3.5 Drilling with in Situ Fabricated Tool 69
3.6 Micro Electrical Discharge Milling (µED-Milling) 70
4 Dimensional Accuracy and Precision Measurement 71
4.1 Micro-rods 72
4.2 Micro Holes 73
4.3 Micro Slots 78
5 State of the Art of µEDM 78
5.1 Micro Wire Electrical Discharge Grinding (µWEDG) 78
5.2 Block Micro Electrical Discharge Machining (B-µEDG) 80
5.3 Micro Electrical Discharge Drilling (µED-Drilling) 80
5.4 Reverse Micro Electrical Discharging Machining (R-µEDM) 82
5.5 Drilling with In Situ Fabricated Tool 83
5.6 Micro Electrical Discharge Milling (µED-Milling) 83
6 Summary 85
References 85
Improvement of Profile Accuracy in WEDM—A Novel Technique 89
1 Introduction 89
2 Wire Deflection and Its Impact on Workpiece Accuracy 90
3 Development of a New Method for Determination of WireLag and Gap Force 92
4 Summary 104
References 104
Laser-based Fabrication of Micro-channels 105
1 Introduction 105
2 Fabrication of Micro-channels 106
3 Laser-based Fabrication of Micro-channels 108
3.1 Overview and Process Fundamentals 108
3.2 Improvement of Quality and Accuracy 109
4 Underwater Laser Micro-channeling 110
4.1 Overview and Process Fundamentals 110
4.2 Improvement of Quality and Accuracy 111
4.3 An Experimental Case Study 111
5 Summary 114
References 115
Pulsed Nd:YAG Laser Cutting: Accuracy Improvement and Parametric Influences 118
1 Introduction 118
2 Pulsed Nd:YAG Laser 119
2.1 Process and Performance Parameters 121
3 Pulsed Nd:YAG Laser Cutting of Metals 121
4 Pulsed Nd:YAG Laser Cutting of Non-metals 123
5 Pulsed Nd:YAG Laser Cutting of Composites 124
6 Applications of Artificial Intelligence in Pulsed Nd:YAG Laser Cutting 125
7 Summary 126
References 126
Improvement in Surface Finish and Geometrical Accuracy by Laser Micro-turning 129
1 Introduction 129
2 Problems of Micro-turning of Ceramics 130
3 Laser Micro-turning Process 131
4 Materials, Machine, Method and Measurement Schemes 135
5 Results and Discussion 137
5.1 Investigation of Overlap Factors on Performance Criteria 137
5.2 Investigation of Laser Defocusing on Machining Performance 142
6 Assessments of Machined Images Taken in Precision Microscope 150
7 Summary 152
References 154
Accuracy Improvement Techniques in Electrochemical Micromachining (EMM) 156
1 Introduction 157
2 Design of Microtools 158
3 Electrolyte Circulation 163
4 Microtool Insulation 164
5 Microsparks Phenomena in EMM 166
6 IEG Control Strategy 166
7 Machining Strategy 167
8 Selection of Combined Process Parameters 168
9 Hybrid EMM Processes 168
10 Summary 168
References 170
Surface Micromachining—Advances and Advanced Characterization Techniques 172
1 Introduction 173
2 Photolithography 175
2.1 Accuracy Enhancement in Photolithography 178
2.2 Applications of Photolithography 182
3 Reactive Ion Etching 182
3.1 Accuracy Enhancement in Reactive Ion Etching 184
3.2 Applications of Reactive Ion Etching 185
4 Deep Reactive Ion Etching Process 185
4.1 Accuracy Enhancement of DRIE 186
4.2 Applications of Deep Reactive Ion Etching 188
5 Focused Ion Beam Fabrication 189
5.1 Accuracy Enhancement in FIB 189
5.2 Applications of FIB 193
6 Electron Beam Lithography 193
6.1 Accuracy Enhancement in EBL 195
6.2 Applications of EBL 196
7 Advanced Characterization Methods 196
7.1 Stereo Zoom Microscope 197
7.2 Scanning Electron Microscopy 198
7.3 Scanning Tunneling Microscopy 200
8 Summary 203
References 203
Generation of Nano-Level Surface Finish by Advanced Nano-Finishing Processes 206
1 Introduction 207
2 Abrasive Flow Finishing (AFF) 207
3 Elastic Emission Finishing (EEF) 209
4 Magnetic Abrasive Finishing (MAF) 210
5 Magnetorheological Finishing (MRF) 211
5.1 Magnetorheological Abrasive Flow Finishing (MRAFF) 214
5.2 Ball End MR Finishing (MRF) Process 215
5.3 Magnetic Field-Assisted Finishing (MFAF) Process 216
6 Chemical Mechanical Polishing (CMP) Process 217
7 Summary 219
References 219