Photolithography

DEAR READER, Since 2001, we supply a growing clientele of institutes, start-ups and production facilities with substrates and chemicals for microstructuring. At the same time, we have always endeavoured to make your work in the clean room as efficient as possible through our technical advice to you as a user of our products. With this book, we would like to give you comprehensive, application-oriented know-how on wafers, photo chemicals and the structuring steps carried out with these. Theoretical basics are dealt with only to the extent as they are helpful for the understanding of the relationships between the process parameters. This keeps the focus on the description and explanation of practical examples. We unfortunately cannot (always) give you ready-to-use recipes with guaranteed success on the way into the clean room. Rather, in the following chapters, our main objective is to provide you with all the necessary understanding for the planning, realisation and optimisation of your lithographic processes in all sub-steps with a minimum of time. Wishing you much success, Your MicroChemicals