Radiation Imaging Detectors Using SOI Technology

Yasuo Arai received his Ph.D. in nuclear science from Tohoku University in 1982. Since 1982, he has been working at High Energy Accelerator Research Organization (named KEK). From 1982-1986, he worked on the data acquisition system for the VENUS experiment at the electron-positron collider accelerator TRISTAN. From 1987, he has been working on the development of readout LSI for radiation detector. Especially, he has designed TDC LSIs for the ATLAS detector, which led to the discovery of Higgs particle in 2012. In 2005, he has started a new project to develop monolithic radiation image sensor by using SOI technology, and he is a leader of the SOI pixel collaboration. He is now a professor in the electronics system group of KEK. Ikuo Kurachi is a professor with High Energy Accelerator Research Organization (Japan). He holds a Ph.D. in engineering (Tokyo University of Science, Japan, 2016) and B.S. in applied physics (Tokyo University of Science, Japan, 1983). He has over 30 years of experience in semiconductor device manufacturing at OKI Electric Industry Co., Ltd. (Japan), OKI Semiconductor Co., Ltd. (Japan), and Powerchip Technology Corp. (Taiwan) where he was a leader of process integration development in DRAM, NVM, LOGIC, and sensor devices. His research interests are interface state property of Si-SiO2, MOSFET reliability, and process integration technologies. He has published over 40 articles in journals and conferences. CMOS ET

Preface
Acknowledgments
Introduction
Major Issues in SOI Pixel Detector
Basic SOI Pixel Process
Radiation Hardness Improvements
Advanced Process Developments
Detector Research and Developments
Summary
Bibliography
Authors' Biographies