Rapid Thermal Processing of Semiconductors

Victor E. Borisenko, Peter J. Hesketh (Autoren)

Buch | Softcover

358 Seiten

2013 | Softcover reprint of the original 1st ed. 1997
Springer-Verlag New York Inc.
978-1-4899-1806-2 (ISBN)

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

1. Transient Heating of Semiconductors by Radiation.- 2. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals.- 3. Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon.- 4. Component Evaporation, Defect Annealing, and Impurity Diffusion in the III–V Semiconductors.- 5. Diffusion Synthesis of Silicides in Thin-Film Metal—Silicon Structures.- 6. Rapid Thermal Oxidation and Nitridation.- 7. Rapid Thermal Chemical Vapor Deposition.- References.

Reihe/Serie	Microdevices
Zusatzinfo	XXII, 358 p.
Verlagsort	New York
Sprache	englisch
Maße	155 x 235 mm
Themenwelt	Naturwissenschaften ► Chemie ► Analytische Chemie
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
	Technik ► Elektrotechnik / Energietechnik
	Technik ► Maschinenbau
ISBN-10	1-4899-1806-X / 148991806X
ISBN-13	978-1-4899-1806-2 / 9781489918062
Zustand	Neuware