Rapid Thermal Processing of Semiconductors

Victor E. Borisenko, Peter J. Hesketh (Autoren)

Buch | Hardcover

358 Seiten

1997
Kluwer Academic/Plenum Publishers (Verlag)
978-0-306-45054-9 (ISBN)

Artikel merken

...gebraucht verfügbar!

Zustand: Akzeptabel 87,37 €

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

1. Transient Heating of Semiconductors by Radiation.- 2. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals.- 3. Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon.- 4. Component Evaporation, Defect Annealing, and Impurity Diffusion in the III–V Semiconductors.- 5. Diffusion Synthesis of Silicides in Thin-Film Metal—Silicon Structures.- 6. Rapid Thermal Oxidation and Nitridation.- 7. Rapid Thermal Chemical Vapor Deposition.- References.

Reihe/Serie	Microdevices
Zusatzinfo	XXII, 358 p.
Verlagsort	New York
Sprache	englisch
Maße	178 x 254 mm
Themenwelt	Naturwissenschaften ► Chemie ► Analytische Chemie
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
	Technik ► Elektrotechnik / Energietechnik
	Technik ► Maschinenbau
ISBN-10	0-306-45054-2 / 0306450542
ISBN-13	978-0-306-45054-9 / 9780306450549
Zustand	Neuware