Advances in Imaging and Electron Physics (eBook)

Front Cover 1
Aberration-Corrected Electron Microscopy 4
Copyright Page 5
Contents 6
Contributors 12
Preface 14
Future Contributions 18
PART 1 Historical background 22
Chapter 1 History of Direct Aberration Correction 24
I. Introduction 24
II. Birth of Aberration Correction 26
III. Other Early Correction Efforts 30
IV. The Darmstadt Correction Project 33
V. The Chicago and EMBL Quadrupole-Octopole Probe Correctors 39
VI. Evolution of the Hexapole Corrector 40
VII. Aberration Correction of Systems with Curved Axis 46
VIII. Revival of the Quadrupole-Octopole Corrector 50
IX. Conclusion and Outlook 55
Acknowledgments 57
References 57
PART 2 Aberration corrector design 62
Chapter 2 Present and Future Hexapole Aberration Correctors for High-Resolution Electron Microscopy 64
I. Introduction 65
II. Present Hexapole Correctors 91
III. Hexapole Aplanats 122
IV. Conclusion 135
Acknowledgments 137
References 138
Chapter 3 Advances in Aberration-Corrected Scanning Transmission Electron Microscopy and Electron Energy-Loss Spectroscopy 142
I. Introduction 142
II. Aberration Correction by Non-Round Lenses 145
III. Performance of Aberration-Corrected Instruments 150
IV. New Applications 161
V. Conclusions 175
Acknowledgments 176
References 176
PART 3 Results obtained with aberration-corrected instruments 182
Chapter 4 First Results Using the Nion Third-Order Scanning Transmission Electron Microscope Corrector 184
I. Introduction 184
II. The IBM High-Resolution STEM/EELS System 185
III. First Results 189
IV. Calculation of Probe Properties 195
V. Imaging of Crystalline Objects 197
VI. AlN/GaN/AlN Quantum Well Structure 200
VII. Hafnium Oxide Gate Stack 204
VIII. Multislice Simulations 208
IX. Atomic Movement Under the Electron Beam 211
X. Conclusions 213
Acknowledgments 214
References 214
Chapter 5 Scanning Transmission Electron Microscopy and Electron Energy Loss Spectroscopy: Mapping Materials Atom by Atom 216
I. Introduction 216
II. Experimental Heuristics 217
III. Case Studies 220
IV. Discussion 242
References 242
Chapter 6 Aberration Correction With the SACTEM-Toulouse: From Imaging to Diffraction 246
I. Introduction 246
II. Aberration Correction and Strain Mapping 253
III. Aberration-Corrected Convergent-Beam Electron Holography 261
IV. Aberration-Corrected Electron Diffraction 266
V. Pseudo-Lorentz Mode for Medium-Resolution Electron Holography 273
VI. Conclusions 277
Acknowledgments 277
References 277
Chapter 7 Novel Aberration Correction Concepts 282
I. Introduction 282
II. Concepts for Improving Resolution for In Situ TEM 283
III. Cc Correction 286
IV. Summary 300
Acknowledgments 301
References 301
Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy 304
I. Introduction 305
II. The Wave Aberration Function 307
III. Coherence Effects in CTEM and STEM 318
IV. Aberration-Correction Imaging Conditions 329
V. Conclusions 340
Acknowledgments 341
References 341
Chapter 9 Materials Applications of Aberration-Corrected Scanning Transmission Electron Microscopy 348
I. Introduction 348
II. Key Instrumental Advances 349
III. Measurement and Definition of Resolution 369
IV. Complex Oxides: Manganites 376
V. High-Temperature Superconductors 382
VI. Complex Dislocation Core Structures 384
VII. Understanding Structure-Property Relations in Ceramics 388
VIII. Semiconductor Quantum Wires 392
IX. Catalysts 395
X. Future Directions 398
Acknowledgments 399
References 399
Chapter 10 Spherical Aberration-Corrected Transmission Electron Microscopy for Nanomaterials 406
I. Introduction 407
II. Imaging Theories of HRTEM Using Aberration Correctors 408
III. Actual Advantages for Observation by Cs-Corrected TEM 427
IV. Actual Advantages for Observation by Cs-Corrected STEM 445
V. Three-Dimensional Observation of Atomic Objects in Cs-Corrected STEM 451
VI. Conclusion and Future Prospects 454
Acknowledgments 455
References 455
Chapter 11 Atomic-Resolution Aberration-Corrected Transmission Electron Microscopy 460
I. Introduction 461
II. Fundamentals of Atomic-Resolution Imaging in a Transmission Electron Microscope 461
III. Atomic-Resolution Electron Microscopy and the Inversion of the Scattering and Imaging Problem 471
IV. Selected Materials Science Applications 478
V. Conclusions 498
References 499
Chapter 12 Aberration-Corrected Electron Microscopes at Brookhaven National Laboratory 502
I. Introduction 502
II. Environmental Requirements and Laboratory Design for Aberration-Corrected Electron Microscopes 504
III. The BNL Aberration-Corrected Instruments 513
IV. A Brief Comparison of the Three Instruments 528
V. Evaluation and Applications of STEM 531
VI. Outlook 541
Acknowledgments 542
References 542
Contents of Volumes 151 and 152 546
Index 548
Color Plate Section 560