Optical Measurement of Surface Topography
Springer Berlin (Verlag)
978-3-642-12011-4 (ISBN)
Professor Richard Leach works at National Physical Laboratory, Teddington, UK, since 1990. He is a visiting Professor of the Wolfson School for Mechanical and Manufacturing Engineering, Loughborough University. His current position is Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovation Division. He is the lead scientist on three DIUS National Measurement System Engineering Measurement Programme projects: areal surface texture and structured surfaces metrology, development of low force transfer artefacts and probes for micro-coordinate measuring machines. He is also lead scientist on projects funded by DIUS Measurement for Innovators (MfI), EPSRC and EU. Professor Leach is the Measurement Service Manager for the Engineering Nanometrology Measurement Service at NPL.
Introduction to surface texture measurement.- Some common terms and definitions.- Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy.- Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.- Coherence scanning interferometry.- Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods
From the reviews:
"This book shows how optical microscopy can be used in the characterization and metrology of various surfaces. ... Several important methods are presented in a clear and simple way ... . The case studies scattered throughout the text greatly improve the readability and contribute to the practical emphasis of this book. ... the index is comprehensive. I recommend this book to anyone trying to find the most appropriate method for surface topography measurement, as well as researchers who are new to using microscopy for measurements." (Dejan Pantelic, Optics & Photonics News, December, 2011)Erscheint lt. Verlag | 5.4.2011 |
---|---|
Zusatzinfo | XIII, 323 p. |
Verlagsort | Berlin |
Sprache | englisch |
Maße | 155 x 235 mm |
Gewicht | 640 g |
Themenwelt | Naturwissenschaften |
Technik ► Elektrotechnik / Energietechnik | |
Technik ► Maschinenbau | |
Schlagworte | Confocal microscopy • Instrument calibration • Oberflächentechnik • Scattering Methods • Surface Roughness • Topography characterization |
ISBN-10 | 3-642-12011-3 / 3642120113 |
ISBN-13 | 978-3-642-12011-4 / 9783642120114 |
Zustand | Neuware |
Haben Sie eine Frage zum Produkt? |
aus dem Bereich