EUV Lithography

Vivek Bakshi (Autor)

Buch | Hardcover

702 Seiten

2009
John Wiley & Sons Inc (Verlag)
978-0-470-47155-5 (ISBN)

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EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Vivek Bakshi is the President of EUV Litho, Inc. He was previously a senior member of the technical staff of Sematech, Inc. Dr. Bakshi studied at the University of Texas at Austin; the University of Idaho; and the Indian Institute of Technology at Kanpur.

Erscheint lt. Verlag	16.1.2009
Verlagsort	New York
Sprache	englisch
Maße	178 x 254 mm
Gewicht	1542 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-470-47155-7 / 0470471557
ISBN-13	978-0-470-47155-5 / 9780470471555
Zustand	Neuware