Micro Electro Mechanical Systems

One of the biggest challenges facing engineers involved in MEMs research, development, and manufacturing is identifying a structured MEMS design methodology. Providing a structured approach to microsystem design, this book focuses on the development of a standard methodology for MEMS design using Six Sigma techniques.

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One of the biggest challenges facing engineers involved in MEMs research, development, and manufacturing is identifying a structured MEMS design methodology. Existing MEMS design literature has placed a significant emphasis on the modeling aspect of design. There is need for a book that describes a design "methodology" for MEMS. This book builds on the extensive body of literature that already exists on analytical and numerical multi-Physics "modeling" and provides a structured approach to microsystem design. "Micro Electro Mechanical Systems (MEMS): A Design Approach" focuses on the development of a standard methodology for MEMS design using Six Sigma techniques. This book will be of interest to engineering professionals, academics and researchers involved in the manufacturing, development and design of Micro-Electro-Mechanical Systems (MEMS) and also to students learning MEMS design and/or practical Six Sigma methods.