Post-Processing Techniques for Integrated MEMS
Seiten
2005
|
Unabridged edition
Artech House Publishers (Verlag)
978-1-58053-901-2 (ISBN)
Artech House Publishers (Verlag)
978-1-58053-901-2 (ISBN)
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Focuses on the critical process of integrating MEMS with standard pre-processed electronics. This book provides engineers, working in a variety of fields, with a process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.
The reduction of size in mechanical systems results in a dramatic decrease of power consumption and cost, while greatly improving performance and reliability. For this reason MEMS (microelectromechanical systems) has become of great interest to electrical engineers working in a wide range of application areas, from DNA analysis and medical applications, to digital projection displays and imaging, This cutting-edge book focuses on a the critical process of integrating MEMS with standard pre-processed electronics. It provides engineers, working in a variety of fields, with an innovative process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.
The reduction of size in mechanical systems results in a dramatic decrease of power consumption and cost, while greatly improving performance and reliability. For this reason MEMS (microelectromechanical systems) has become of great interest to electrical engineers working in a wide range of application areas, from DNA analysis and medical applications, to digital projection displays and imaging, This cutting-edge book focuses on a the critical process of integrating MEMS with standard pre-processed electronics. It provides engineers, working in a variety of fields, with an innovative process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.
Sherif Sedky is an associate professor in the physics department at The American University in Cairo. He received both his M.Sc. and Ph.D. in electronic engineering from Katholiek Univeriteit, Leuven, Belgium. He is an extensively published author and holder of four patents.
Preface. Acknowledgement. MEMS Monolithic Integration Techniques. Maximum Post-Processing Temperature. MEMS Materials. Silicon Germanium as an Attractive MEMS Material. Low Thermal Budget Techniques for Enhancing Crystallization. Post-Processed MEMS Devices. Short Author Biography. List of Acronyms. List of Keywords.
| Verlagsort | Norwood |
|---|---|
| Sprache | englisch |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| ISBN-10 | 1-58053-901-7 / 1580539017 |
| ISBN-13 | 978-1-58053-901-2 / 9781580539012 |
| Zustand | Neuware |
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