Semiconductor Manufacturing Equipment Reliability

To achieve a world-class level of reliability, organizations must have adequate knowledge of the discipline to participate effectively. Semiconductor Manufacturing Equipment Reliability serves as a guidebook to the fundamental principles and applications of reliability for the industry, based on the authors' 30 years of experience. With an emphasis on the basic phases of a reliability improvement program throughout a product's development lifecycle, this book provides readers with a working knowledge of reliability improvement without an in-depth examination of a deep mathematical theory of reliability. It also includes real-world examples of best practices to improve reliability.