Pulsed Laser Deposition of Thin Films - Douglas B. Chrisey, G.K. Hubler

Pulsed Laser Deposition of Thin Films

Buch | Hardcover
648 Seiten
1994
John Wiley & Sons Inc (Verlag)
978-0-471-59218-1 (ISBN)
151,30 inkl. MwSt
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A summary of contemporary research in the field, which examines theory, film characteristics, surface modification, laser technology, materials and applications. The text also includes reviews of semiconductor buffet layers, thin-film ferroelectrics and ferrites.
This overview describes how to begin research in this newly developing technology, allowing the reader to understand the basics of the process. Internationally recognized experts in their fields cover such fundamentals as history, theory, film characteristics, surface modification, laser technology, materials and applications. The text also includes reviews regarding the entire area of semiconductor buffer layers, thin-film ferroelectrics and ferrites, along with the work involving films deposited by PLD.

Partial table of contents: History and Fundamentals of Pulsed Laser Deposition (J. Cheung). Diagnostics and Characteristics of Laser--Produced Plasmas (D. Geohegan). Particulates Generated by Pulsed Laser Ablation (L.--C. Chen). Angular Distribution of Ablated Material (K. Saenger). Film Nucleation and Film Growth in Pulsed Laser Deposition of Ceramics (J. Horwitz & J. Sprague). Processes Characteristics and Film Properties in Pulsed Laser Plasma Deposition (S. Metev). Commercial Scale--Up of Pulsed Laser Deposition (J. Greer). Pulsed Laser Deposition: Future Trends (T. Venkatesan). Comparison of Vacuum Deposition Techniques (G. Hubler). Pulsed Laser Deposition of High--Temperature Superconducting Thin Films for Active and Passive Device Applications (R. Muenchausen & X. Wu). Pulsed Laser Deposition of Metals (J. Kools). Appendix. References. Index.

Erscheint lt. Verlag 28.6.1994
Zusatzinfo Illustrations
Verlagsort New York
Sprache englisch
Maße 166 x 245 mm
Gewicht 1054 g
Themenwelt Naturwissenschaften Physik / Astronomie Festkörperphysik
Naturwissenschaften Physik / Astronomie Optik
Technik Maschinenbau
ISBN-10 0-471-59218-8 / 0471592188
ISBN-13 978-0-471-59218-1 / 9780471592181
Zustand Neuware
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