Handbook of Ellipsometry

About The Editors: Harland Tompkins is a consultant with more than thirty years experience in thin films for microelectronics, applied surface science, and vacuum technology. With a Ph.D. in physics from the University of Wisconsin-Milwaukee, he previously worked 12 years at Bell Laboratories and 16 years at Motorola. He has authored more than 75 technical papers and two other best selling books on ellipsometry, one at an introductory level for casual users and the other an intermediate book for process engineers. He is a Fellow of the AVS. Eugene Irene, a Ph.D. from Rensselaer Polytechnic Institute, is Professor of Chemistry at the University of North Carolina, Chapel Hill. He began his academic career in 1982 after 10 years experience at IBM’s Thomas J. Watson Research Center. He is the author of over 230 publications in the areas of thin films and dielectrics and is the recipient of several awards. He is a Fellow of the AVS.

Polarized Light and Ellipsometry.- Optical Physics of Materials.- Data Analysis for Spectroscopic Ellipsometry.- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer.- Rotating Polarizer and Analyzer Ellipsometry.- Polarization Modulation Ellipsometry.- Multichannel Ellipsometry.- SiO2 Films- Theory and Application of Generalized Ellipsometry.- VUV Ellipsometry.- Spectroscopic Infrared-Ellipsometry.- Ellipsometry in Life Sciences.