MicroMechatronics

CURRENT TRENDS FOR ACTUATORS AND MICROMECHATRONICS
The Need for New Actuators
Conventional Methods for Micropositioning
An Overview of Solid-State Actuators
Critical Design Concepts and the Structure of the Text

A THEORETICAL DESCRIPTION OF FIELD-INDUCED STRAINS
Ferroelectricity
Microscopic Origins of Electric Field Induced Strains
Tensor/Matrix Description of Piezoelectricity
Theoretical Description of Ferroelectric and Antiferroelectric Phenomena
Phenomenology of Magnetostriction
Ferroelectric Domain Reorientation
Grain Size and Electric Field-Induced Strain in Ferroelectrics

ACTUATOR MATERIALS
Practical Actuator Materials
Figures of Merit for Piezoelectric Transducers
The Temperature Dependence of the Electrostrictive Strain
Response Speed
Mechanical Properties of Actuators

CERAMIC ACTUATOR STRUCTURES AND FABRICATION METHODS
Fabrication of Ceramics and Single Crystals
Device Design
Electrode Materials
Commercially Available Piezoelectric and Electrostrictive Actuators

DRIVE / CONTROL TECHNIQUES FOR PIEZOELECTRIC ACTUATORS
Classification of Piezoelectric Actuators
Feedback Control
Pulse Drive
Resonance Drive
Sensors and Specialized Components for Micromechatronic Systems

LOSS MECHANISMS AND HEAT GENERATION
Hysteresis and Loss in Piezoelectrics
Heat Generation in Piezoelectrics
Hard and Soft Piezoelectrics

INTRODUCTION TO THE FINITE ELEMENT METHOD FOR PIEZOELECTRIC STRUCTURES
Background Information
Defining the Equations for the Problem
Application of the Finite Element Method

SERVO DISPLACEMENT TRANSDUCER APPLICATIONS
Deformable Mirrors
Microscope Stages
High Precision Linear Displacement Devices
Servo Systems
VCR Head Tracking Actuators
Vibration Suppression and Noise Elimination Systems

PULSE DRIVE MOTOR APPLICATIONS
Imaging System Applications
Inchworm Devices
Dot Matrix Printer Heads
InkJet Printers
Piezoelectric Relays
Adaptive Suspension Systems

ULTRASONIC MOTOR APPLICATIONS
General Description and Classification of Ultrasonic Motors
Standing Wave Motors
Mixed-Mode Motors
Traveling Wave Motors
Mode Rotation Motors
Performance Comparison Among Various Ultrasonic Motors
Microscale Walking Machines
Calculations for the Speed and Thrust of Ultrasonic Motors
Elements of Designing an Ultrasonic Motor
Other Ultrasonic Motor Applications
Magnetic Motors
Reliability of Ultrasonic Motors

THE FUTURE OF CERAMIC ACTUATORS IN MICROMECHATRONIC SYSTEMS
Development Trends as Viewed from Patent Statistics
The Piezoelectric Actuator/Ultrasonic Motor Market
Future Trends in Actuator Design
INDEX