A Practical Guide to Surface Metrology (eBook)
XXV, 230 Seiten
Springer International Publishing (Verlag)
978-3-030-29454-0 (ISBN)
This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context.
Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).The book provides:
- Overview of the working principles
- Description of advantages and disadvantages
- Currently achievable numbers for resolutions, repeatability, and reproducibility
- Examples of real-world applications
A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of
surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.
Dr. habil. Michael Quinten is a senior staff member at FRT GmbH in Bergisch Gladbach, working as Head of R&D Sensors and Head of Technical Coordination. Previously he was project manager in development and product manager at the STEAG ETA-Optik GmbH in Heinsberg, Product Manager for 'Color and Coatings' (Color measurement, coating thickness measurement and simulation), 'Spectrometry UV-VIS-NIR' and 'Integrated Optics'. He has been Research assistant at the Universities of Chemnitz TU, University of Saarland, Ruhr-University Bochum, RWTH Aachen and visiting professor at the Karl-Franzens-University Graz.
Preface 7
Contents 9
About the Author 12
List of Figures 13
List of Tables 22
Chapter 1: Introduction to Surfaces and Surface Metrology 23
1.1 Microscopic View on a Surface 25
1.2 Macroscopic View on a Surface 27
1.3 Measurement and Validation 30
1.3.1 Profile Measurement 38
1.3.2 Areal Measurement 49
1.3.3 Measurement Modules 53
1.3.3.1 Stages 54
1.3.3.2 Piezoelectrical and Inductive Transducers 56
1.3.3.3 Optical Detectors 56
1.3.3.4 Light Sources 60
1.3.4 The Way to Reliable Surface Data 61
References 63
Chapter 2: Tactile Surface Metrology 64
2.1 Tactile Surface Profiling 64
2.2 Atomic Force Microscopy 68
References 75
Chapter 3: Capacitive and Inductive Surface Metrology 77
3.1 Capacitive Surface Profiling 77
3.2 Surface Profiling with Eddy Currents 82
References 85
Chapter 4: Optical Surface Metrology - Physical Basics 86
4.1 Electromagnetic Waves 86
4.2 Huygens-Fresnel Principle of Wave Propagation 89
4.3 Polarization 90
4.4 Interference 91
4.5 Coherence 93
4.6 Dielectric Function and Refractive Index 94
4.7 Reflection and Refraction 100
4.8 Dispersion Effects 103
4.9 Diffraction 105
4.10 Scattering 107
References 111
Chapter 5: Optical Surface Metrology: Methods 113
5.1 Chromatic Confocal Surface Profiling 113
5.2 Surface Profiling with an Autofocus Sensor 120
5.3 Light Sectional Methods 122
5.3.1 Laser Point Triangulator 122
5.3.2 Line Projection 123
5.3.3 Fringe Projection 124
5.4 Microscopy Methods 126
5.4.1 Classical Microscopy 127
5.4.2 Confocal Microscopy 133
5.4.3 Focal Depth Variation 142
5.4.4 Scanning Near-Field Optical Microscopy 145
5.5 Interferometric Methods 146
5.5.1 Interferometric Form Inspection 150
5.5.1.1 Form Inspection of Planar Surfaces 150
5.5.1.2 Form Inspection of Spherical, Aspherical and Freeform Surfaces 151
5.5.2 Tilted Wave Interferometry 152
5.5.3 White Light Interferometry 154
5.5.4 Wavelength Scanning Interferometry 163
5.5.5 Multi-Wavelength Interferometry 165
5.5.6 Grazing Incidence Interferometry 168
5.5.7 Frequency Scanning Interferometry 171
5.5.8 Digital Holographic Microscopy 173
5.5.9 Conoscopy 177
5.6 Wave Front Sensing (Shack-Hartmann) 178
5.7 Deflectometry 181
5.8 Makyoh Topography Sensor 183
5.9 Surface Profiling Using Elastic Light Scattering 185
5.9.1 Total Integrated Scattering (TIS) 186
5.9.2 Angular Resolved Scattering (ARS) 187
5.9.3 Speckle Based Roughness Determination 191
5.10 Spectral Analysis and Characterization 194
5.10.1 Reflectometry 195
5.10.1.1 Optical Film Thickness Determination 197
5.10.1.2 Critical Dimensions Determination 204
5.10.2 Spectroscopic Ellipsometry 206
References 208
Chapter 6: Imaging Methods 217
6.1 Industrial Image Processing 217
6.1.1 Illumination 219
6.1.2 Camera 219
6.1.3 Image Processing Hardware 220
6.1.4 Digital Image Processing Software 220
6.1.5 Mechanics 221
6.2 Shape from Shading 221
6.3 Hyperspectral Imaging 223
6.4 Scanning Electron Microscopy 226
6.5 Optical Coherence Tomography 229
6.6 Terahertz Spectroscopy 231
References 234
Chapter 7: Multisensor - Systems - A Versatile Approach to Surface Metrology 236
Appendix - Numerics with Complex Numbers 240
Addition 240
Multiplication 241
Modulus 241
Division 242
Power n 242
Logarithm 243
Exponentiation 243
Trigonometric Functions 243
Index 244
| Erscheint lt. Verlag | 1.1.2020 |
|---|---|
| Reihe/Serie | Springer Series in Measurement Science and Technology | Springer Series in Measurement Science and Technology |
| Zusatzinfo | XXV, 230 p. 156 illus., 100 illus. in color. |
| Sprache | englisch |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie |
| Technik ► Maschinenbau | |
| Schlagworte | Confocal optical profiling • Digital holographic microscopy • Elastic light scattering • Grazing incidence interferometry • Light sectional methods • Multi-wavelength interferometry • Practical surface characterisation • Practical surface measurement • Scanning nearfield optical microscopy • Shearing interferometry • Spectral Reflectometry and Ellipsometry • Surface optical metrology • White light interferometry |
| ISBN-10 | 3-030-29454-4 / 3030294544 |
| ISBN-13 | 978-3-030-29454-0 / 9783030294540 |
| Haben Sie eine Frage zum Produkt? |
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