Handbook of Thin Film Process Technology, CD-ROM

PHYSICAL DEPOSITION TECHNIQUES
Thermal Evaporation (Coordinating Editors: E.B. Graper and J. Vossen)
Introduction and general discussion (E.B. Graper)
Resistance evaporation (E.B. Graper)
Electron beam evaporation (E.B. Graper)
Ion vapor evaporation (E.B. Graper)
Cathodic arc deposition (P.J. Martin)
Laser ablation (A. Morimoto and T. Shimizu)

Molecular Beam Epitaxy (Coordinating Editors: S.A. Barnett and J. Poate)
Introduction and general discussion (S.A. Barnett and I.T. Ferguson)
Semiconductor growth by metalorganic molecular beam epitaxy (MOMBE) (C.R. Abernathy)
Gas-source MBE (G.Y. Robinson)
Chemical beam epitaxy (T.H. Chiu)
Thin film deposition and dopant incorporation by energetic particle sources (S. Strite and H. Morkoc)

Sputtering (Coordinating Editors: S.I. Shah and D. Glocker)
Introduction and general discussion (S.I. Shah)
Glow discharge sputtering (A.S. Penfold)
Magneton sputtering (A.S. Penfold)
Ion-beam sputtering (T. Itoh)

Thermal Spraying (Coordinating Editor: R.C. Tucker Jr.)
Introduction to thermal spray coatings (R.C. Tucker Jr.)
Flame spray (P.A. Kammer)
Plasma spray coatings (R.C. Tucker Jr.)
High velocity oxy-fuel coatings (R.C. Tucker Jr.)
Detonation gun deposition (R.C. Tucker Jr.)
Mechanical, wear, corrosion, and other properties of thermal spray coatings (R.C. Tucker Jr.)

CHEMICAL DEPOSITION TECHNIQUES
Chemical Vapor Deposition (Coordinating Editor: L. Vescan)
Introduction and general discussion (L. Vescan)
Metalorganic chemical vapour deposition (MOCVD) (R.D. Dupuis)
Photoassisted chemical vapour deposition (S.J.C. Irvine)
Thermally activated chemical vapour deposition (L. Vescan)
Atomic layer epitaxy (T. Suntola)

PROCESSING TECHNOLOGIES
Pattern Transfer (Coordinating Editor: J.W. Coburn
Introduction and general discussion (J.W. Coburn)
Reactive ion etching (C. Steinbruchel)
Ion-beam-based chemical dry etching (C. Steinbruchel)
Ion milling (C. Steinbruchel)

REAL-TIME DIAGNOSTICS
Introduction and General Discussion (Coordinating Editor: R.W. Collins)
Diagnostic Techniques
Reflection high-energy electron diffraction as a diagnostic technique (B.A. Joyce)
Low-energy electron diffraction (Sheng-Liang Chang and P.A. Thiel)
Reflection mass spectroscopy (R. Kaspi)

Optical Diagnostics
Infrared emission interferometry (A.J. Springthorpe)
Reflectance anisotropy (B. Drevillon)
Interferometry as an in situ probe during processing of semiconductor wafers (V.M. Donnelly)
Ellipsometry (P. Snyder)
Photoluminescence (P.R. Berger)
Elastic laser light scattering (B. Gallois)

Plasma Probes
Langmuir probe diagnostics (N. Hershkowitz)
Microwave interferometers (R.A. Breun)
Atomic absorption spectroscopy (Chih-shun Lu)

Other Diagnostics (Coordinating Editor: R. Collins)
Quartz monitors and microbalances (J. Krim and C. Daly)
Probes of film stress (D. Glocker)

SURFACE MODIFICATION IN VACUUM
Processes for Substrate Cleaning (D. Mattox)
Surface Treatment for Corrosion and Wear Protection
Material aspects of corrosion protection (Cathy Cotell)
Ion implantation with beams (Mike Nastasi)
Plasma source ion implantation (Donald Rej)

Surface Treatment of Polymers for Adhesion
Plasma sources for polymer surface treatment (M.R. Wertheimer and Edward Liston)
Surface chemistry of treated polymers (Lou Gerenser)

MATERIALS
Hard and Protective Materials
Introduction (O. Knotek and A. Schrey)
TiN
TiAIN
TiAIVN
CrN
ZrN
HfN
BN
Diamond
Ni-Cr-B-Si
Al-bronze
Al2O3-TiO2

Electronic Materials
Introduction (K. Cadien and S. Sivaram)
GaAs
a-Si:H
AlGaAs
Tellurides
CuInSe2
Si
Ge
Si-Ge
W
GaN
AIN
ErAs
Quaternaries
Silicides
SiSnC
SiN

Optical Materials
Introduction (J. Targove)
AIN
ZnO
PbTiO3
KNbO3

Ferroelectric Materials
Introduction (M. Sayer)
Bi4Ti3O12
LiNbO3 and LiTaO3
PbTiO3/PbZrTiO3

Ferromagnetic Materials
Introduction (E.M.T. Velu and D.N. Lambeth)
CoCr
TbFeCo
CoPt/CoPd
GdTbFe

Superconducting Materials
Introduction (J. Azoulay)
NbN
YBa2Cu3O7
Thallium-based compounds
Mercury-based compounds

Miscellaneous Materials
PTFE
PPN
Ir/Pt

Appendix A: List of Contributors
Subject Index