Handbook of Thin Film Process Technology
Seiten
1995
Institute of Physics Publishing (Verlag)
978-0-7503-0311-8 (ISBN)
Institute of Physics Publishing (Verlag)
978-0-7503-0311-8 (ISBN)
- Titel ist leider vergriffen;
keine Neuauflage - Artikel merken
This reference covers the most important thin film deposition techniques, as well as aspects of film processing and the major diagnostic techniques for in-process monitoring. It presents deposition system details and process parameters for a range of common materials and processes.
Physical deposition techniques: thermal evaporation; molecular beam epitaxy; sputtering; thermal spraying. Chemical deposition techniques: chemical vapour deposition. Processing technologies: pattern transfer. Real time diagnostics: diagnostic techniques; optical diagnosis; probes of the gas phase; plasma probes; superconducting matierals; miscellaneous materials. Supplier information.
Zusatzinfo | illustrations |
---|---|
Verlagsort | London |
Sprache | englisch |
Maße | 210 x 297 mm |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Maschinenbau | |
ISBN-10 | 0-7503-0311-5 / 0750303115 |
ISBN-13 | 978-0-7503-0311-8 / 9780750303118 |
Zustand | Neuware |
Haben Sie eine Frage zum Produkt? |