Piezoelectric MEMS Resonators

Harmeet Bhugra, Gianluca Piazza (Herausgeber)

Buch | Softcover

XII, 424 Seiten

2018 | 1. Softcover reprint of the original 1st ed. 2017
Springer International Publishing (Verlag)
978-3-319-80405-7 (ISBN)

Artikel merken

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include:

Widely-used piezoelectric materials, as well as materials in which there is emerging interest
Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
...and more!

The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Harmeet "Mitu" Bhugra lead the development of the world's first PiezoElectric MEMS timing and sensor products at IDT. He holds 22 US patents and has published multiple technical papers and given multiple talks on MEMS technology. Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.

AIN Thin Film Processing and Basic Properties.- Lead Zirconate Titanate (PZT) for M/NEMS.- Gallium Nitride for M/NEMS.- Lithium Niobate for M/NEMS Resonators.- Quality Factor and Coupling in Piezoelectric MEMS Resonators.- Flexural Piezoelectric Resonators.- Laterally Vibrating Piezoelectric MEMS Resonators.- BAW Piezoelectric Resonators.- Shear Piezoelectric MEMS Resonators.- Temperature Compensation of Piezo-MEMS Resonators.- Computational Modeling Challenges.- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators.- Reliability and Quality Assessment (Stability and Packages).- Large Volume Testing and Calibration.- High Frequency Oscillators for Mobile Devices.- BAW Filters and Duplexers for Mobile Communication.

Erscheinungsdatum	05.03.2022
Reihe/Serie	Microsystems and Nanosystems
Zusatzinfo	XII, 424 p. 231 illus., 127 illus. in color.
Verlagsort	Cham
Sprache	englisch
Maße	155 x 235 mm
Gewicht	664 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
Schlagworte	AlN MEMS • BAW piezoelectric resonators • GaAs for MEMS • GaN NEMS • GaN Resonator • MEMS Resonators • Piezoelectric MEMS • PiezoMEMS Resonators • pMEMS • PZT MEMS
ISBN-10	3-319-80405-7 / 3319804057
ISBN-13	978-3-319-80405-7 / 9783319804057
Zustand	Neuware