Outlook and Challenges of Nano Devices, Sensors, and MEMS

Juin J. Liou received the B.S. (honors), M.S., and Ph.D. degrees in electrical engineering from the University of Florida, Gainesville, in 1982, 1983, and 1987, respectively. In 1987, he joined the Department of Electrical and Computer Engineering at the University of Central Florida (UCF), Orlando, Florida where he is now the Pegasus Distinguished Professor, Lockheed Martin St. Laurent Professor, and UCF-Analog Devices Fellow. His current research interests are Micro/nanoelectronics computer-aided design, RF device modeling and simulation, and electrostatic discharge (ESD) protection design, modeling and simulation. Dr. Liou holds 8 U.S. patents (3 more filed and pending), and has published 9 books, more than 260 journal papers (including 17 invited review articles), and more than 210 papers (including 90 keynote and invited papers) in international and national conference proceedings.

Introduction.- High-k dielectric for nanoscale MOS devices.- Performance, optimization, and reliability of FinFET devices.- Performance, optimization, and challenges of emerging nanowire field-effect transistors.- Graphene technology for future MEMS and sensor applications.- Nanoscale sensors for next-generation optical transceiver applications.- Nanoscale MEMS for future optical communication applications.- Nanoscale devices for biomedical applications.- Effect of nanoscale structure on reliability of nano devices and sensors.- Compact modeling of nano devices and sensors.- Three-dimensional TCAD simulation of nano semiconductor devices.- Fabrication of nano devices based on novel material.- Novel processing technology for fabricating nano devices and sensors.- Conclusions.