Nano-tribology and Materials in MEMS
Springer Berlin (Verlag)
978-3-662-50698-1 (ISBN)
Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS.- Nanofriction by Reciprocating Sliding.- The structure and tribological behaviors of nanostructure thin films.- Detection of lateral forces and formation of atomic chains.- Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects.- Microfabricated sleds for friction studies.- Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications.- A Novel Method of Lubrication of Micro-Electro-Mechanical Systems.- Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS.- Lubrication of High Sliding MEMS.- Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant.- Probing the complexities of Friction in submicron contacts between two pristine surfaces.- Atomistic Simulation of Polymer Nanotribology.- Simulation of frictional behavior of polymer-on-polymer sliding.- Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications.
Erscheinungsdatum | 29.08.2016 |
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Zusatzinfo | VIII, 275 p. 157 illus., 89 illus. in color. |
Verlagsort | Berlin |
Sprache | englisch |
Maße | 155 x 235 mm |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Maschinenbau | |
Schlagworte | Engineering • Materials in Mems • Mechatronics • MEMS Coatings • Micro-Tribology • Nanofriction • Nano-Lubricants • Nanotechnology and Microengineering • other manufacturing technologies • SiO2/Si substrate • Surface Forces • Tribology, Corrosion and Coatings • Tribology (friction and lubrication) |
ISBN-10 | 3-662-50698-X / 366250698X |
ISBN-13 | 978-3-662-50698-1 / 9783662506981 |
Zustand | Neuware |
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