Nanofabrication
Principles and Applications
Seiten
2016
|
1st ed. 2016
Springer International Publishing (Verlag)
978-3-319-31740-3 (ISBN)
Springer International Publishing (Verlag)
978-3-319-31740-3 (ISBN)
This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.
Introduction.- Silicon Planar Processing and Photolithography.- Direct-write Lithography Approaches.- Stamping Methods.- Scanning-probe Methods.- Natural Lithography.- Direct-Growth and Self-assembly.- Practical Examples and Case Studies of Nanofabrication.
Erscheinungsdatum | 08.10.2016 |
---|---|
Reihe/Serie | SpringerBriefs in Materials |
Zusatzinfo | VI, 81 p. 41 illus., 31 illus. in color. |
Verlagsort | Cham |
Sprache | englisch |
Maße | 155 x 235 mm |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Maschinenbau | |
Schlagworte | Chemistry and Materials Science • Electronics and Microelectronics, Instrumentation • Emerging Self-assembly Approaches • Metallic nanoparticles • Nanofabrication Applications • Nanofabrication Applications in Biotechnology • Nanofabrication Applications in Nanoelectronics • Nanofabrication from Lithography • Nanofabrication Principles • Nanopatterning Introduction • Nanoscale Patterning • nanoscale science and technology • nanotechnology • self-assembly of nanostructures • semiconductors |
ISBN-10 | 3-319-31740-7 / 3319317407 |
ISBN-13 | 978-3-319-31740-3 / 9783319317403 |
Zustand | Neuware |
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