Nanopositioning Technologies

Fundamentals and Applications

Changhai Ru, Xinyu Liu, Yu Sun (Herausgeber)

Buch | Hardcover

VI, 409 Seiten

2016 | 1st ed. 2016
Springer International Publishing (Verlag)
978-3-319-23852-4 (ISBN)

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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

1.A review of Stick-Slip Nanopositioning Actuators.- 2. Piezoelectric Motor Technology - A Review.- 3.Design of High-speed Nanopositioning Systems.- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.- 5.Electro-magnetic Nano Positioning.- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis.- 7. Tracking Control for Nanopositioning.- 8.Position Sensors for Nanopositioning.- 9. MEMS Nanopositioners.- 10.Control Issues of MEMS nanopositioning devices.- 11. A Review of Nanomanipulation in Scanning Electron Microscopes.- 12. Nanopositioning for lithography and data storage.

Erscheint lt. Verlag	7.1.2016
Zusatzinfo	VI, 409 p. 279 illus., 203 illus. in color.
Verlagsort	Cham
Sprache	englisch
Maße	155 x 235 mm
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Schlagworte	Control, Robotics, Mechatronics • Electronics and Microelectronics, Instrumentation • Engineering • Engineering design • Flexure-Guided Nanopositioning • MEMS Nanopositioning • Nanomanipulation • Nanopositioning Applications • Nanopositoning Technologies • Nanopostioning • Nanotechnology and Microengineering • Piezoelectric Actuation • Piezoelectric Nanopositioning • Tracking Control for Nanopositioning
ISBN-10	3-319-23852-3 / 3319238523
ISBN-13	978-3-319-23852-4 / 9783319238524
Zustand	Neuware