Handbook of Optical Metrology

Toru Yoshizawa received his BS, MS, and doctorate of engineering from the University of Tokyo, Japan. After ten years of research and educational works at Yamanashi University, Kofu, Japan, he moved to Tokyo University of Agriculture and Technology, Japan, where he was professor in the Department of Mechanical Systems Engineering for 25 years. After retirement from the university, he worked in industry for three years, and then moved to Saitama Medical University, Japan to explore medical and biomedical fields using optical techniques. Currently he is director at Non-Profit Organization 3D Associates, Yokohama, Japan, and professor emeritus at Tokyo University of Agriculture and Technology.

Light Sources. Lenses, Prisms, and Mirrors. Optoelectronic Sensors. Optical Devices and Optomechanical Elements. Propagation of Light. Interferometry. Holography. Speckle Methods and Applications. Moiré Metrology. Optical Heterodyne Measurement Method. Diffraction. Light Scattering. Polarization. Near-Field Optics. Length and Size. Displacement. Straightness and Alignment. Flatness. Surface Profilometry. Three-Dimensional Shape Measurement. Fringe Analysis. Photogrammetry. Optical Methods in Solid Mechanics. Optical Methods in Flow Measurement. Polarimetry. Birefringence Measurement. Ellipsometry. Optical Thin Film and Coatings. Film Surface and Thickness Profilometry. Optical Coherence Tomography for Industrial Applications. Interference Microscopy for Surface Structure Analysis. Noncontact Dimensional and Profile Metrology by Video Measurement. Optical Metrology in Manufacturing Technology. On-Machine Measurements.