Semiconductor-On-Insulator Materials for Nanoelectronics Applications
Seiten
2014
|
2011
Springer Berlin (Verlag)
978-3-642-26708-6 (ISBN)
Springer Berlin (Verlag)
978-3-642-26708-6 (ISBN)
Devoted to the evolving field of modern nanoelectronics, this volume presents the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. Topics include new semiconductor-on-insulator materials, physics of modern SemOI devices, and MEMS on SOI.
"Semiconductor-On-Insulator Materials for NanoElectronics Applications" is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications" is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
"Semiconductor-On-Insulator Materials for NanoElectronics Applications" is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications" is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
New semiconductor-on-insulator materials.- Physics of modern SemOI devices.- Diagnostics of the SOI devices.- Sensors and MEMS on SOI.
Erscheint lt. Verlag | 14.10.2014 |
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Reihe/Serie | Engineering Materials |
Zusatzinfo | IX, 447 p. |
Verlagsort | Berlin |
Sprache | englisch |
Maße | 155 x 235 mm |
Gewicht | 700 g |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Maschinenbau | |
Schlagworte | MEMS • MOSFET • MOSFET (MOS-Feldeffekt-Transistor) • Nanowires • sensors |
ISBN-10 | 3-642-26708-4 / 3642267084 |
ISBN-13 | 978-3-642-26708-6 / 9783642267086 |
Zustand | Neuware |
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