Secondary Ion Mass Spectrometry (eBook)

Paul van der Heide is a recognized leader in surface analysis with emphasis on the application of Secondary Ion Mass Spectrometry (SIMS). This interest started during his PhD (completed in 1992 at the University of Auckland) which involved the design and construction of a magnetic sector SIMS instrument. Paul has since been heavily involved in the application and development of SIMS at the University of Western Ontario, the University of Houston (where he also filled in various Professor level positions), Samsung Austin Semiconductor, and most recently at GlobalFoundries (NY). Paul has ~100 publications with this representing his 2nd book.

Forward x

Preface xi

Acknowledgements xiv

List of physical constants xiv

Chapter 1: Introduction

1.1 Matter and the Mass Spectrometer

1.2 Secondary Ion Mass Spectrometry

1.3 Summary

Section I

Chapter 2: Properties of atoms, ions, molecules and solids

2.1 The Atom

2.2 Electronic structure of atoms and ions

2.3 Summary

Chapter 3: Current understanding of sputtering and ion formation

3.1 The fundamentals of SIMS

3.2 Sputtering

3.3 Ionization/neutralization

3.4 Summary

Section II

Chapter 4: Instrumentation

4.1 The science of measurement

4.2 Hardware

4.3 Summary

Chapter 5: Data collection

5.1 The art of measurement

5.2 Sample preparation and handling

5.3 Data collection

5.4 Data conversion

5.5 Summary

Appendix

i) Periodic table of the elements

ii) Isotope masses, natural isotope abundances, atomic weights and mass densities of the elements

iii) 1st and 2nd Ionization potentials and electron affinities of the elements

iv) Work-functions of elemental solids

v) SIMS detection limits of selected elements

vi) Charged particle beam transport

vii) Statistical properties

viii) SIMS instrument designs

ix) Additional SIMS methods of interest

x) Additional spectrometric/spectroscopic techniques

xi) Additional microscopic techniques

xii) Diffraction / reflection techniques

Technique acronym list

Abbreviations commonly used in SIMS

Glossary of terms

Questions and answers

References

Index

Notes

"It is well worth owning if you want to learn about this exciting surface science technique for studying materials." (IEEE Electrical Engineering magazine, 1 May 2015)

"The entire book, and especially the second part, is a good reference work for users of D-SIMS and S-SIMS and for those working in other methods in analytical chemistry and the applied scientific fields, including the biosciences, where SIMS is now becoming a major experimental method." (Anal Bioanal Chem, 21 February 2015)