FIB Nanostructures (eBook)
XIII, 530 Seiten
Springer International Publishing (Verlag)
978-3-319-02874-3 (ISBN)
FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of possible applications of nanofabrication. FIB techniques are widely used in the semiconductor industry and in materials research for deposition and ablation, including the fabrication of nanostructures such as nanowires, nanotubes, nanoneedles, graphene sheets, quantum dots, etc. The main objective of this book is to create a platform for knowledge sharing and dissemination of the latest advances in novel areas of FIB for nanostructures and related materials and devices, and to provide a comprehensive introduction to the field and directions for further research. Chapters written by leading scientists throughout the world create a fundamental bridge between focused ion beam and nanotechnology that is intended to stimulate readers' interest in developing new types of nanostructures for application to semiconductor technology. These applications are increasingly important for the future development of materials science, energy technology, and electronic devices. The book can be recommended for physics, electrical engineering, and materials science departments as a reference on materials science and device design.
PrefaceChapter 1: Focused Ion Beam (FIB) technology for micro and nanoscale fabricationsChapter 2: Epitaxial ferroelectric nanostructures fabricated by FIB millingChapter 3: Low current focused-ion-beam milling for freestanding nanomaterial characterizationChapter 4: Focused ion beam milling of carbon nanotube yarns and Bucky-papers: Correlating their internal structure with their macro-propertiesChapter 5: Nanoscale electrical contacts grown by Focused-Ion-Beam (FIB) Induced DepositionChapter 6: Metal induced crystallization of focused ion beam induced deposition for functional patterned ultrathin nanocarbonChapter 7: Deterministic Fabrication of Micro- and Nano-Structures by Focused Ion BeamChapter 8: Application of ion beam processes to scanning probe microscopyChapter 9: Fabrication of needle-shaped specimens containing sub-surface nanostructures for Electron TomographyChapter 10: Fabrication technique of deformation carriers (gratings and speckle patterns) with FIB for micro/nano-scale deformation measurementChapter 11: Controlled Quantum Dot Formation on Focused Ion Beam patterned GaAs SubstratesChapter 12: Development of Functional Metallic Glassy Materials by FIB and Nano-imprint TechnologiesChapter 13: Nanostructured Materials Driven by Dielectrophoresis on Nanoelectrods Patterned by Focused Ion BeamChapter 14: Focused Ion Beam Assisted Nano-Scale Processing and Thermoelectrical CharacterizationChapter 15: FIB design for Nanofluidic applicationsChapter 16: FIB Patterning of Stainless Steel for the Development of Nano-Structured Stent Surfaces for Cardiovascular ApplicationsChapter 17: Evaluation of damages induced by Ga+ focused ion beam in piezoelectric nanostructuresChapter 18: Instabilities in Focused Ion Beam-patterned nanostructuresChapter 19: Nanostructures by mass-separated FIB Index
| Erscheint lt. Verlag | 4.1.2014 |
|---|---|
| Reihe/Serie | Lecture Notes in Nanoscale Science and Technology |
| Zusatzinfo | XIII, 530 p. 375 illus., 200 illus. in color. |
| Verlagsort | Cham |
| Sprache | englisch |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| Technik ► Maschinenbau | |
| Schlagworte | AFM Cantilever Calibration • Agmicro-Nanostructures • Deterministic Fabrication of Nanostructures FIB • Epitaxial Ferroelectric Nanostructures • FIB • FIB-Fabricated AU • FIB Fabrication Semiconductor Nanostructures • FIB Induced Deposition • FIB Milling • Focused Ion Beam • Gratings and Speckle Patterns FIB • Ion Beam Ething • Ion Beam Milling • Mass-Separated FIB • Nanofabrication • Nano-Needles FIB • Nanopatterning Thin Films FIB • Nanopore Arrays • nanostructure • Nanowire-based Devices • Patterning Graphene Nanostructures • Single Nanopores |
| ISBN-10 | 3-319-02874-X / 331902874X |
| ISBN-13 | 978-3-319-02874-3 / 9783319028743 |
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