Digital Holography for MEMS and Microsystem Metrology (eBook)

Anand Asundi, Nanyang Technological University, Singapore Anand Asundi is Professor and Deputy Director of the Advanced Materials Research Centre at Nanyang Technological University in Singapore. His research interests are in photomechanics and optical sensors & he has published over 200 papers in peer-reviewed journals and presented invited and plenary talks at international conferences. He has also chaired and organized numerous conferences in Singapore and other parts of the world. He is Editor of Optics and Lasers in Engineering and on the Board of Directors of SPIE, and a fellow of the Institute of Engineers, Singapore and SPIE. He also holds advisory professorial appointments at Tongji University, Shanghai University and Harbin Institute of Technology, China. He is Chairman of the Asian Committee on Experimental Mechanics and the Asia Pacific Committee on Smart and Nano Materials both of which he co-founded.

About the Editor.

List of contributors.

Chapter 1 Introduction (A. Asundi).

Chapter 2 Digital Reflection Holography and applications (V.R. Singh and A. Asundi).

2.1 Introduction to digital holography and methods.

2.2 Reflection digital holographic microscopy (DHM) developments.

2.3 3D imaging, static and dynamic measurements.

2.4 MEMS/Microsystems characterization applications.

Chapter 3 Digital Transmission Holography and applications (Qu Weijuan).

3.1 Historical Introduction.

3.2 Foundation of Digital Holography.

3.3 Digital Holographic Microscopy System.

3.4 Conclusion.

Chapter 4 Digital In-line Holography and applications (slima Khanam).

4.1. Back ground.

4.2. Digital in-line holography.

4.3. Methodology for 2D measurement of micro-particle.

4.4. Validation and performance of the 2D measurement method.

4.5. Methodology for 3D measurement of micro-fiber.

4.6. Validation and performance of the 3D measurement methods.

4.7. Summary & conclusions.

Chapter 5 Other Applications.

5.1 Digital Holography Tomography (DHT) (Yu Yingjie).

5.2 High resolution Pulsed Digital Holography (Caojin Yuan and Hongchen Zhai).

5.3 Digital Holographic Interferometry for Phase Distribution Measurement (Jianlin Zhao).

Chapter 6 Conclusion.