Reliability of MEMS
Wiley-VCH (Verlag)
978-3-527-33501-5 (ISBN)
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processing.
This edition of CMOS-MEMS was originally published in the successful series Advanced Micro & Nanosystems . A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider s view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro- and nanoprobes.
The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
Osamu Tabata is Professor in the Department of Microengineering at Kyoto University. He received his MSc and PhD degrees from Nagoya Institute of Technology. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, in 1996, and the Department of Mechanical Engineering at Kyoto University in 2003. Osamu Tabata is engaged in the research of micro/nano processes, MEMS and micro/nano system synthetic engineering. He received numerous awards, including the Science News Award and the Research & Development Top 100 Award in 1993 and 1998. Toshiyuki Tsuchiya is Assistant Professor in the Department of Microengineering at Kyoto University. He received his PhD from Nagoya University, Japan, in 2002. From 1993 to 2004, he carried out industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. In 2004, he joined the Department of Mechanical Engineering of Kyoto University. Toshiyuki Tsuchiya's current research is focused on mechanical properties evaluation of micro/nano materials and MEMS and micro/nano system synthetic engineering.
PREFACE
EVALUATION OF MECHANICAL PROPERTIES OF MEMS MATERIALS AND THEIR STANDARDIZATION
ELASTOPLASTIC INDENTATION CONTACT MECHANICS OF HOMOGENEOUS MATERIALS AND COATING?SUBSTRATE SYSTEMS
THIN-FILM CHARACTERIZATION USING THE BULGE TEST
UNIAXIAL TENSILE TEST FOR MEMS MATERIALS
ON-CHIP TESTING OF MEMS
RELIABILITY OF A CAPACITIVE PRESSURE SENSOR
INERTIAL SENSORS
INERTIAL SENSORS
RELIABILITY OF MEMS VARIABLE OPTICAL ATTENUATOR
ECO SCAN MEMS RESONANT MIRROR
INDEX
| Erscheint lt. Verlag | 23.4.2013 |
|---|---|
| Mitarbeit |
Herausgeber (Serie): Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink |
| Verlagsort | Weinheim |
| Sprache | englisch |
| Maße | 170 x 240 mm |
| Gewicht | 643 g |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| Technik ► Maschinenbau | |
| Schlagworte | Analytical Chemistry • Analytische Chemie • Chemie • Chemistry • Control Systems Technology • Electrical & Electronics Engineering • Electrical & Electronics Engineering • Electronic materials • Electronic Packaging • Elektronikbauteile • Elektronische Materialien • Elektrotechnik u. Elektronik • Halbleiter • Industrial Chemistry • Materials Science • Materialwissenschaften • MEMS • MEMS (Mikroelektromechanische Systeme) • Mikroelektromechanik • Mustererkennung • Nanotechnologie • nanotechnology • Pattern Analysis • Regelungstechnik • Robotics • Robotik • semiconductors • Sensoren • Sensoren, Instrumente u. Messung • Sensor Materials • Sensors, Instrumentation & Measurement • Sensors, Instrumentation & Measurement • Technische u. Industrielle Chemie |
| ISBN-10 | 3-527-33501-3 / 3527335013 |
| ISBN-13 | 978-3-527-33501-5 / 9783527335015 |
| Zustand | Neuware |
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