Lithography
Seiten
2010
John Wiley & Sons Inc (Hersteller)
978-1-118-55766-2 (ISBN)
John Wiley & Sons Inc (Hersteller)
978-1-118-55766-2 (ISBN)
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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.
| Verlagsort | New York |
|---|---|
| Sprache | englisch |
| Maße | 150 x 250 mm |
| Gewicht | 3436 g |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| ISBN-10 | 1-118-55766-2 / 1118557662 |
| ISBN-13 | 978-1-118-55766-2 / 9781118557662 |
| Zustand | Neuware |
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