Semiconductor Silicon
Springer Berlin (Verlag)
978-3-642-74725-0 (ISBN)
I Crystal Growth.- Czochralski Growth of Silicon.- Chemical and Physical Considerations in the Chemical Vapor Deposition Process.- Silicon Molecular Beam Epitaxy (Si-MBE).- II Processing.- Simulation of Silicon Processing.- Simulation of Laser-Assisted Doping of Silicon - The Temperature Distribution.- Ion Implantation.- Low Temperature Epitaxial Crystallization of Amorphous Si by Ion-Beam Irradiation.- On the Generation of Ripples on Silicon.- III Defects.- Theory of Defects in Crystalline Silicon.- Defects in CZ Silicon.- Tellurium Related Deep Traps in Silicon.- IV Characterization Methods.- High Resolution Electron Microscopy of Defects in Silicon.- Tunneling Microscopy and Surface Analysis.- Scanning Minority Carrier Transient Spectroscopy: A Method to Investigate the Lateral Distribution of Defects in Semiconductors.- Optical Characterization of Silicon Materials and Structures.- Oxygen-Free Silicon; How Does IR See It?.- V Insulating Films.- Characterization of the SiO2-Si Interface.- Advanced Silicon on Insulator Materials: Processing, Characterization and Devices.- VI Silicide Films.- Properties of Transition Metal Silicides.- State Density Gap in Ti-Silicide/p-Si/p+Si Schottky Barriers.- Morphology and Structure of Thin TiSi2 Films on Silicon.- Modelling Diffusion in Silicides.- VII Devices.- 4 Mbit Technology.- Technology and Reliability Problems of Trench Cell Capacitors.- Heavy Doping Effects and Their Influence on Silicon Bipolar Transistors.- Ionizing Radiation Effects in MOS Devices.- Crystalline Silicon Solar Cells.- Index of Contributors.
Erscheint lt. Verlag | 16.12.2011 |
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Reihe/Serie | Springer Series in Materials Science |
Zusatzinfo | IX, 345 p. |
Verlagsort | Berlin |
Sprache | englisch |
Maße | 155 x 235 mm |
Gewicht | 545 g |
Themenwelt | Naturwissenschaften ► Chemie ► Physikalische Chemie |
Technik ► Elektrotechnik / Energietechnik | |
Technik ► Maschinenbau | |
ISBN-10 | 3-642-74725-6 / 3642747256 |
ISBN-13 | 978-3-642-74725-0 / 9783642747250 |
Zustand | Neuware |
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