The Physics and Fabrication of Microstructures and Microdevices

I Physics and Engineering of Microfabrication.- High Resolution Lithography (Some Comments on Limits and Future Possibilities).- Submicron Lithography Tools.- Electron Beam Nanolithography.- The Spin Coating Process Mechanism.- Resists Patterning.- Dry Etching: Concepts, Methods and Applications.- Overlayers.- Self-Aligned Growth of Microstructures.- Laser-Induced Growth of Microstructures.- Structural Characterization of Superlattices by X-Ray Diffraction.- Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces.- Fabrication of Small Structures of Semiconductors and Metals.- Atomically Controlled Growth in 2, 1 and OD, and Applications.- Microstructure of Organic Mono- and Multilayers.- II Physics of Microstructures.- Fundamentals of Low Dimensional Physics.- Electron States in Semiconductor Microstructures.- Quantum Transport Theory for Small-Geometry Structures.- Noise in Microstructures.- Transport Physics of Multicontact Si MOS Nanostructures.- 1D Structures - Field Confinement Approach.- Excitons in GaAs Quantum Wells: Interface Disorder and Mobility.- Nonlinear Optics and Electro-Optics of Quantum Wells.- Quantum Interference Effects in Small Systems: Normal and Superconducting Networks.- 2D Localisation and Interaction Effects in Semiconductor Structures.- Optical Nonlinearities in Small Particles and Composite Materials.- Tunnel Currents and Electron Tunnelling Times in Semiconductor Heterostructure Barriers inPresenceanMagnetic Field.- III Perspectives in Microfabrication Applications.- Scaling Limits of Silicon VLSI Technology.- Three Part Series on Heterojunction Transistors.- CAD: Overview and Perspectives.- Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration ofMicroelectronics.- The Metal Base Transistors.- An Integrated Microfabrication System for Low-Dimensionality Structures and Devices.- Fabrication of Gate Array Interconnect Structures Using Direct-Write Deposition Processes.- Electronic Neural Computing.- IV Poster Session, Abstracts.- Fabrication of Submicron Structures Combining E-Beam and Deep-UV Exposure.- Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography.- 2D Josephson Junction Networks.- Electric Field Heating of Supported and Free-Standing AuPd Fine Wires.- High-Frequency Limits of Quantum Noise Detectors Based on Superconducting Tunnel Junction Mixers.- Photoresponse and Transport Properties of a 'Quasi' Graded Gap Superlattice P-I-N Diode.- Disorder and Two-Dimensional Electronic Sub-Bands.- A Model for the Oscillatory Structure in the J(V) Characteristics of GaAs/(AlGa)As Tunneling Structures.- A Minute Metallic Sphere Close to Flat Metal Surface System: A Scanning Tunneling Microscope Problem.- A Calculation of the Effect of Subband Structure on the Thermopower of a Quasi-1D Wire.- The Effect of Electron-Electron Scattering on the Distribution Function in Semiconductors.- Index of Contributors.