Micro– and Nano–Electro–Mechanical Resonant Transistors

Micro- and Nano-Electro-Mechanical Resonant Transistors, explains the design, analysis, and application of hybrid Microelectromechanical systems (MEMS) and Complementary Metal-Oxide-Semiconductor (CMOS) resonator devices and their potential applications.

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Describes state-of-the-art resonant transistors, including a review of their potential applications This book explains the design, analysis and application of hybrid Microelectromechanical systems (MEMS) and Complementary Metal Oxide Semiconductor (CMOS) resonator devices; currently a hot topic in the semiconductor industry. It also presents the technology, design and modelling of state-of-the-art resonant transistors and their applications as a micromechanical resonator with internal gain, with a particular focus on time and frequency reference applications. * Includes state-of-the-art reviews and selected lists of references in each chapter. * Provides descriptions of basic physics for Field-effect Transistor (FET) based motion detection. * Reports existing technology solutions to implement movable FETs for in-plane and out-of-plane motion detection. * Highlights the main differences with the existing solid-state technology and provides engineering solutions for fast and successful implementation. * Discusses the potential of the technology compared to other known transduction principles.