Substrate Surface Preparation

Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing... to specialized techniques and surface finishing.

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"Substrate Surface Preparation" serves as a practical, one-stop reference covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing...to specialized techniques and surface finishing. Supported with over 125 illustrations, this unique book provides a complete understanding of important maintenance methods and the full range of equipment available in the field. Practitioners gain the know-how and confidence they need to produce desired results when processing a sample of new material, rather than wasting time and money on a trial and error approach. Moreover, this authoritative book presents in-depth discussions on key applications, such as optics production and semiconductor de-lamination and deconstruction.