Ceramic Thick Films for MEMS and Microdevices - Robert A. Dorey

Ceramic Thick Films for MEMS and Microdevices

(Autor)

Buch | Hardcover
192 Seiten
2011
William Andrew Publishing (Verlag)
978-1-4377-7817-5 (ISBN)
179,95 inkl. MwSt
  • Keine Verlagsinformationen verfügbar
  • Artikel merken
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. This book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used.
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications – forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads.  Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc.

Dr. Robert Dorey is a Royal Academy of Engineering/EPSRC Research Fellow, Senior Lecturer in Micro a

Integration and applications

Routes to thick films

Thick film deposition techniques

Microstructure-property relationships

Pattering and structuring

Houston, we have a problem: Thick film troubleshooting

Recipes and techniques

Reihe/Serie Micro & Nano Technologies
Verlagsort Norwich
Sprache englisch
Maße 191 x 235 mm
Gewicht 540 g
Themenwelt Technik Elektrotechnik / Energietechnik
ISBN-10 1-4377-7817-8 / 1437778178
ISBN-13 978-1-4377-7817-5 / 9781437778175
Zustand Neuware
Haben Sie eine Frage zum Produkt?
Mehr entdecken
aus dem Bereich
Wegweiser für Elektrofachkräfte

von Gerhard Kiefer; Herbert Schmolke; Karsten Callondann

Buch | Hardcover (2024)
VDE VERLAG
48,00