Failure Anaylsis – A Practical Guide for Manufacturers of Electronic Components and Systems

Dr. Marius Bazu, National Institute for Research and Development in Microtechnologies, IMT-Bucharest, Bucharest, Romania Dr. Bazu is currently Head of the Reliability Laboratory and Vice-Chair of the Scientific Council at the National Institute for Microtechnologies, IMT-Bucharest, Romania. More than 50 National research projects on the reliability of electronic components have been co-ordinated by Dr. Bazu. He is a member of the Management Board and Chair of the Reliability Cluster of the Network of Excellence "Design for Micro and Nano Manufacture- PATENT-DfMM". From 1997 until 1999 he was Leader of a European project on a built-in reliability technology, and in 2000 he received the AGIR (General Association of Romanian Engineers) Award for implementing a technology of Building-In Reliability to a Romanian semiconductor company. Dr Bazu is the co-author of four Romanian Patents and has contributed to over 120 scientific papers. Since 1986 he has been Invited Professor for post-graduate courses on Reliability at the University Polytechnic Bucharest. He has presented invited lectures to international conferences held across Europe, including Austria, Romania, and Serbia. Mr. Titu Bajenescu, Switzerland Since 1985, Mr Bajenescu has worked as an independent consultant and international expert on engineering management, telecommunications, reliability, quality and safety. He has worked in the reliability, safety and maintainability office of the Ministry of Defence, designing and manufacturing experimental equipment for army research and air defence systems. With Asea Brown Boveri in Switzerland he was involved in the design and manufacture of new industrial equipment for telecommunications. More recently Mr. Bajenescu joined Ascom and as Reliability Manager, contributing to the development of new ITU and IEC standards. He became Quality and Reliability Manager and Product Assurance Manager of Messtechnik und Optoelektronic. Mr. Bajenescu has authored numerous technical books which have been published in English, French, German and Romanian, and has written many papers on modern telecommunications, and quality and reliability engineering and management. He currently speaks on these subjects as a visiting lecturer at universities around Europe.

Series Editor s Foreword. Foreword by Dr. Craig Hillman. Series Editor s Preface. Preface. About the Authors. 1 Introduction. 1.1. The Three Goals of the Book. 1.2. Historical Perspective 1.3. Terminology. 1.4. State of the Art and Future Trends. 1.5. General Plan of the Book. References. 2 Failure Analysis - Why? 2.1. Eight Possible Applications. 2.2. Forensic Engineering. 2.3. Reliability Modeling. 2.4. Reverse Engineering. 2.5. Controlling Critical Input Variables. 2.6. Design for Reliability. 2.7. Process Improvement. 2.8. Saving Money by Early Control. 2.9. A Synergetic Approach. References. 3 Failure Analysis - When? 3.1. During Development Cycle. 3.2. Preparing the Fabrication. 3.3. FA during Fabrication. 3.4. FA after Fabrication. 3.5. FA during Operation or Storage. References. 4 Failure Analysis - How? 4.1. Procedures for failure analysis. 4.2. Techniques for decapsulating the device and for sample preparation. 4.3. Techniques for failure analysis. References. 5. Failure Analysis - What? 5.1 Failure Modes and Mechanisms at Various Process Steps. 5.2 Failure Modes and Mechanisms of Passive Electronic Parts. 5.3 Failure Modes and Mechanisms of Silicon Bipolar Technology. 5.4 Failure Modes and Mechanisms of MOS Technology. 5.5 Failure Modes and Mechanisms of Optoelectronic and Photonic Technologies. 5.6 Failure Modes and Mechanisms of Non-Silicon Technologies. 5.7 Failure Modes and Mechanisms of Hybrid Technology. 5.8 Failure Modes and Mechanisms of Microsystem Technologies. References. 6 Case Studies. 6.1 Case Study No. 1: Capacitors. 6.2 Case Study No. 2: Bipolar Power Devices. 6.3 Case Study No. 3: CMOS Devices. 6.4 Case Study No. 4: MOS Field Effect Transistors. 6.5 Case Study No. 5: Thin Film Transistors. 6.6 Case Study No. 6: High Electron Mobility Transistors. 6.7 Case Study No. 7: MEMS Resonators. 6.8 Case Study No. 8: MEMS Micro-Cantilevers. 6.9 Case Study No. 9: MEMS Switches. 6.10 Case Study No. 10: Magnetic MEMS Switches. 6.11 Case Study No. 11: Chip-Scale Packages. 6.12 Case Study No. 12: Solder Joints. 6.13 Conclusions. References. 7. Conclusions. References. Acronyms. Glossary. Index.