MEMS Vibratory Gyroscopes
Structural Approaches to Improve Robustness
Seiten
2010
|
Softcover reprint of hardcover 1st ed. 2009
Springer-Verlag New York Inc.
978-1-4419-3489-5 (ISBN)
Springer-Verlag New York Inc.
978-1-4419-3489-5 (ISBN)
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.
Erscheint lt. Verlag | 9.11.2010 |
---|---|
Reihe/Serie | MEMS Reference Shelf |
Zusatzinfo | 131 Illustrations, black and white; XII, 260 p. 131 illus. |
Verlagsort | New York, NY |
Sprache | englisch |
Maße | 155 x 235 mm |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Fahrzeugbau / Schiffbau | |
Technik ► Maschinenbau | |
ISBN-10 | 1-4419-3489-8 / 1441934898 |
ISBN-13 | 978-1-4419-3489-5 / 9781441934895 |
Zustand | Neuware |
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