Micromechatronic Systems and Applications

This text covers microsensors and micromachined microsystems and their applications. The emphasis is on the mechanical ("micromechatronic") structures and micro-electromechanical systems (MEMS), addressing a need for information arising from the trend toward smaller engines and devices.

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This text covers microsensors and micromachined microsystems and their applications. The emphasis is on the mechanical ("micromechatronic") structures and micro-electromechanical systems (MEMS). This book addresses a need for information arising from the industrial trend to build smaller and smaller engines and devices. It should interest students, research workers, and practitioners in physics, technology, mechanical engineering, and electrical engineering.