Semiconductors for Micro– and Nanotechnology – An Introduction for Engineers

Jan G. Korvink earned his M.Sc. in computational mechanics from the University of Cape Town in 1987, and his Ph.D. in applied computer science from the ETH Zurich in 1993. He joined the Physical Electronics Laboratory of the ETH Zurich, where he established and lead the MEMS Modelling Group. In 1997 he became a professor for microsystems engineering at Albert Ludwig University in Freiburg, Germany. Prof. Korvink is author or co-author of more than 200 technical publications in the broad area of microsystems. He has written a textbook, numerous book chapters and edited volumes. Andreas Greiner is full professor for Macromolecular Chemistry and Technology at the Philipps-University of Marburg, Germany. He studied chemistry at the University of Marburg and earned his doctorate there in 1988. After a postdoctoral stay with D. Pearson and H.W. Schmidt in Santa Barbara, he returned to Marburg, where he completed his habilitation in macromolecular chemistry in 1995. In the same year, he took up a professorship at the University of Mainz, and in 2000, he became full for Professor of Macromolecular Chemistry and Technology in Marburg. His research interests include the classical synthesis of monomers and polymers, specialty processing like electrospinning, polymer-nanoparticle conjugates, as well as the applications of polymers in optics, electronics, and medicine.

Introduction The Crystal Lattice System The Electronic System The Electromagnetic System Statistics Interacting Subsystems Classical and Semi Classical Transport Theory