Strain-Induced Effects in Advanced MOSFETs

1 Introduction2 Scaling, Power Consumption, and Mobility Enhancement Techniques3 Strain and Stress4 Basic Properties of the Silicon Lattice5 Band Structure of Relaxed Silicon6 Perturbative Methods for Band Structure Calculations in Silicon7 Strain Effects on the Silicon Crystal Structure8 Strain Effects on the Silicon Band Structure9 Strain Effects on the Conduction Band of Silicon10 Electron Subbands in Silicon in the Effective Mass Approximation11 Electron Subbands in Thin Silicon Films12 Demands of Transport Modeling in Advanced MOSFETs