Fundamentals of Semiconductor Fabrication
2003
John Wiley & Sons Inc (Hersteller)
978-0-471-48727-2 (ISBN)
John Wiley & Sons Inc (Hersteller)
978-0-471-48727-2 (ISBN)
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From crystal growth to integrated devices and circuits, this book offers a basic introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.
This book: offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence; presents comprehensive coverage of process sequences; introduces readers to modern simulation tools; addresses the practical aspects of integrated circuit fabrication; and, clearly explains basic processing theory.
This book: offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence; presents comprehensive coverage of process sequences; introduces readers to modern simulation tools; addresses the practical aspects of integrated circuit fabrication; and, clearly explains basic processing theory.
Erscheint lt. Verlag | 3.9.2003 |
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Verlagsort | New York |
Sprache | englisch |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
ISBN-10 | 0-471-48727-9 / 0471487279 |
ISBN-13 | 978-0-471-48727-2 / 9780471487272 |
Zustand | Neuware |
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