RF MEMS Switches and Switch Circuits

The book presents the design and fabrication of RF
MEMS switches and switch circuits. It presents RF
MEMS capacitive switches and MEMS tunable filter
first ever to be produced in Norway. Modeling and
design of high speed switches and high capacitance
ratio switches are presented. Design and simulation
of tunable low pass and bandpass filters are also
described. A model for pull down voltage of a
non-uniform bridge and cantilever is also
highlighted. The fabrication of the capacitive
switches and MEMS tunable filters, conducted in the
SINTEF MiNa lab is described in details. Measurements
of pull down voltage and characterization of RF
performance for the switches and filters (low pass
and band pass) are also presented.