Uncooled Infrared Imaging Arrays and Systems (eBook)

Front Cover 1
Uncooled Infrared Imaging Arrays and Systems 4
Copyright Page 5
Contents 6
List of Contributors 12
Preface 14
Chapter 1. Historical Overview 19
I. Introduction 19
II. History of Electronic Materials Research for Uncooled Imagers 24
III. Uncooled Imaging Arrays Using Silicon Read-Out 27
IV. Future 30
References 32
Chapter 2. Principles of Uncooled Infrared Focal Plane Arrays 35
I. Importance of the Thermal Isolation Structure 35
II. Principal Thermal Detection Mechanisms 41
III. Fundamental Limits 49
IV. Discussion 55
References and Bibliography 58
Chapter 3. Monolithic Silicon Microbolometer Arrays 61
I. Background 63
II. Responsivity of Microbolometers 65
III. Noise in Bolometers 93
IV. Microbolometer Signal-to-Noise 104
V. Electric Read-Out Circuits for Two-Dimensional Microbolometer Arrays 109
VI. Offset Compensation Schemes 113
VII. Gain Correction 115
VIII. Modulation Transfer Function (MTF) 116
IX. Microbolometer Physical Design, Fabrication, and Packaging 116
X. Practical Camera Development 134
References 137
Chapter 4. Hybrid Pyroelectric–Ferroelectric Bolometer Arrays 145
I. Introduction 145
II. Principles of Pyroelectric Detectors 146
III. Practical Considerations and Designs 176
IV. Systems Implementations 191
References 195
Chapter 5. Monolithic Pyroelectric Bolometer Arrays 197
I. Introduction 197
II. Detector Design Methodology 198
III. Process Design 209
IV. Silicon-Based Integrated Pyroelectric Detector Arrays 211
V. Gallium Arsenide-Based Integrated Pyroelectric Detectors 219
VI. Summary 221
References 222
Chapter 6. Thermoelectric Uncooled Infrared Focal Plane Arrays 225
I. Introduction 225
II. Thermopile Infrared Detector 226
III. A 128 x 128 Pixel Thermopile Infrared Focal Plane Array 232
IV. Summary 239
References 240
Chapter 7. Pyroelectric Vidicon 241
I. History 241
II. Performance Analysis 245
References 247
Chapter 8. Tunneling Infrared Sensors 249
I. Introduction 249
II. Sensor Modeling 251
III. Tunneling Transducer Background 261
IV. Tunneling Infrared Sensor Design and Fabrication 267
V. Tunneling Transducer Operation 275
VI. Infrared Sensor Operation and Testing 281
VII. Future Prospects for the Tunneling Infrared Sensor 286
VIII. Conclusion 288
References 288
Chapter 9. Application of Quartz Microresonators to Uncooled Infrared Imaging Arrays 291
I. Introduction 291
II. Quartz Microresonators as Infrared Sensors 293
III. Quartz Thermometers and Their Temperature Coefficients 294
IV. Oscillator Noise 295
V. Frequency Measurement 296
VI. Thermal Isolation 297
VII. Infrared Absorption of Microresonators 299
VIII. Predicted Performance of Microresonator Arrays 301
IX. Producibility and Other Challenges 303
X. Summary and Conclusions 305
Appendix. Performance Calculations 306
References 316
Chapter 10. Application of Uncooled Monolithic Thermoelectric Linear Arrays to Imaging Radiometers 319
I. Introduction 319
II. Identification of Incipient Failure of Railcar Wheels . 320
III. Imaging Radiometer for Predictive and Preventive Maintenance 331
References 340
Index 341
Contents of Volumes in This Series 349