Low-Pressure Synthetic Diamond -

Low-Pressure Synthetic Diamond

Manufacturing and Applications
XI, 384 Seiten
1998
Springer Berlin (Hersteller)
978-3-540-63619-9 (ISBN)
133,70 inkl. MwSt
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The advent of low-pressure synthesis techniques for the chemical vapour deposition (CVD) of diamond has opened up a new and fascinating field of research and development. The preparation of diamond in the shape of thin films or extended wafers has enabled a variety of new applications, including optical windows, heat spreaders for thermal management, durable cutting tools, and a variety of sensors. Great effort has been made to develop new and efficient methods of economic low-pressure diamond deposition. This book responds to the worldwide interest with a comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.
TOC: Introduction.- CVD Diamond: A New and Promising Material.- Methods of CVD-Diamond Production.- Microwave-Plasma Deposition of Diamond.- Combustion Flame Deposition of Diamond.- Plasma-Jet Deposition of Diamond.- Hot-Filament Deposition of Diamond.- Low-Temperature Diamond Deposition.- Other CVD Methods for Diamond Production.- Heteroepitaxy and Highly Oriented Diamond Deposition.- Applications of CVD Diamond.-Thermal Properties and Applications of CVD Diamond.- CVD Diamond for Optical Windows.- CVD Diamond for X-Ray Windows and Lithography Mask Membranes.- CVD Diamond for Cutting Tools.- CVD Diamond Sensors for Temperature and Pressure.- CVD Diamond for Surface Acoustic Wave Filters.- Electron Emission from CVD-Diamond Cold Cathodes.- CVD Diamond for Ultraviolet and Particle Detectors.- Electronic Devices on CVD Diamond.- Outlook: CVD Diamond in the 21st Century.

Summary:
Introduction.- CVD Diamond: A New and Promising Material.- Methods of CVD-Diamond Production.- Microwave-Plasma Deposition of Diamond.- Combustion Flame Deposition of Diamond.- Plasma-Jet Deposition of Diamond.- Hot-Filament Deposition of Diamond.- Low-Temperature Diamond Deposition.- Other CVD Methods for Diamond Production.- Heteroepitaxy and Highly Oriented Diamond Deposition.- Applications of CVD Diamond.-Thermal Properties and Applications of CVD Diamond.- CVD Diamond for Optical Windows.- CVD Diamond for X-Ray Windows and Lithography Mask Membranes.- CVD Diamond for Cutting Tools.- CVD Diamond Sensors for Temperature and Pressure.- CVD Diamond for Surface Acoustic Wave Filters.- Electron Emission from CVD-Diamond Cold Cathodes.- CVD Diamond for Ultraviolet and Particle Detectors.- Electronic Devices on CVD Diamond.- Outlook: CVD Diamond in the 21st Century.

Reihe/Serie Springer Series in Materials Processing
Zusatzinfo 193 figs., 26 tabs.
Sprache englisch
Gewicht 684 g
Einbandart gebunden
Schlagworte CVD-Verfahren • Diamanten • Materialeigenschaften
ISBN-10 3-540-63619-6 / 3540636196
ISBN-13 978-3-540-63619-9 / 9783540636199
Zustand Neuware
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