Ion Implantation Technology
17th International Conference on Ion Implantation Technology, IIT 2008, Monterey, California, 8-13 June 2008
Seiten
2008
|
2008 ed.
American Institute of Physics (Verlag)
978-0-7354-0597-4 (ISBN)
American Institute of Physics (Verlag)
978-0-7354-0597-4 (ISBN)
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Covers the conference that is focused on the advances and technologies in semiconductor processing before, during and after ion implantation. This title includes content that encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design.
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).
Erscheint lt. Verlag | 1.1.2009 |
---|---|
Reihe/Serie | Progress in Molecular and Subcellular Biology / Marine Molecular Biotechnology ; 1066 |
Zusatzinfo | Illustrations |
Verlagsort | New York |
Sprache | englisch |
Maße | 216 x 279 mm |
Einbandart | gebunden |
Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Angewandte Physik |
Technik ► Elektrotechnik / Energietechnik | |
Technik ► Maschinenbau | |
ISBN-10 | 0-7354-0597-2 / 0735405972 |
ISBN-13 | 978-0-7354-0597-4 / 9780735405974 |
Zustand | Neuware |
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