Ion Implantation Technology

17th International Conference on Ion Implantation Technology, IIT 2008, Monterey, California, 8-13 June 2008
Buch | Hardcover
576 Seiten
2008 | 2008 ed.
American Institute of Physics (Verlag)
978-0-7354-0597-4 (ISBN)

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Covers the conference that is focused on the advances and technologies in semiconductor processing before, during and after ion implantation. This title includes content that encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design.
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).
Erscheint lt. Verlag 1.1.2009
Reihe/Serie Progress in Molecular and Subcellular Biology / Marine Molecular Biotechnology ; 1066
Zusatzinfo Illustrations
Verlagsort New York
Sprache englisch
Maße 216 x 279 mm
Einbandart gebunden
Themenwelt Naturwissenschaften Physik / Astronomie Angewandte Physik
Technik Elektrotechnik / Energietechnik
Technik Maschinenbau
ISBN-10 0-7354-0597-2 / 0735405972
ISBN-13 978-0-7354-0597-4 / 9780735405974
Zustand Neuware
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