Into The Nano Era

Historical Background.- Silicon: Child and Progenitor of Revolution.- The Economic Implications of Moore's Law.- State-of-the-Art.- Using Silicon to Understand Silicon.- Theory of Defects in Si: Past, Present, and Challenges.- Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices.- Surface and Interface Chemistry for Gate Stacks on Silicon.- Enhanced Carrier Mobility for Improved CMOS Performance.- Transistor Scaling to the Limit.- Future Directions.- Beyond CMOS Electronics: Self-Assembled Nanostructures.- Hybrid CMOS/Molecular Integrated Circuits.- Sublithographic Architecture: Shifting the Responsibility for Perfection.- Quantum Computing.- Afterwords.- Nano-Whatever: Do We Really Know Where We Are Heading?.- Silicon Forever! Really?.