Developments in Surface Contamination and Cleaning -

Developments in Surface Contamination and Cleaning

Fundamentals and Applied Aspects
Buch | Hardcover
1200 Seiten
2008
William Andrew Publishing (Verlag)
978-0-8155-1555-5 (ISBN)
289,95 inkl. MwSt
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Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. This book addresses the sources, detection, characterization and removal of contaminants, as well as ways to prevent surfaces from being contaminated.
Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking, there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few years ago are ôkiller defectsö today, with serious implications for yield and reliability of the components. This book addresses the sources, detection, characterization and removal of both kinds of contaminants, as well as ways to prevent surfaces from being contaminated. A number of techniques to monitor the level of cleanliness are also discussed. Special emphasis is placed on the behaviour of nanoscale particles. The book is amply referenced and profusely illustrated.

Dr. Rajiv Kohli is a leading expert with The Aerospace Corporation in contaminant particle behavior, surface cleaning, and contamination control. At the NASA Johnson Space Center in Houston, Texas, he provides technical support for contamination control related to ground-based and manned spaceflight hardware, as well as for unmanned spacecraft. His technical interests are in particle behavior, precision cleaning, solution and surface chemistry, advanced materials and chemical thermodynamics. Dr. Kohli was involved in developing solvent-based cleaning applications for use in the nuclear industry and he also developed an innovative microabrasive system for a wide variety of precision cleaning and micro-processing applications in the commercial industry. He is the senior editor of this book series “Developments in Surface Contamination and Cleaning”; the first ten volumes in the series were published in 2008, 2010, 2011, 2012, 2013 (Volumes 5 and 6), 2015 (Volumes 7 and 8), and 2017 (Volumes 9 and 10), respectively. The second edition of Volume 1 was published in 2016. Volume 11 and Volume 12 (this volume) are expected to be published in 2019. Previously, Dr. Kohli co-authored the book “Commercial Utilization of Space: An International Comparison of Framework Conditions”, and he has published more than 270 technical papers, articles and reports on precision cleaning, advanced materials, chemical thermodynamics, environmental degradation of materials, and technical and economic assessment of emerging technologies. Dr. Kohli was recognized for his contributions to NASA’s Space Shuttle Return to Flight effort with the Public Service Medal, one of the agency’s highest awards. Dr. Kashmiri (Kash) Mittal was associated with IBM from 1972 to 1994. Currently, he is teaching and consulting in the areas of adhesion science and technology and in surface contamination and cleaning. He is the founding editor of the Journal of Adhesion Science and Technology and is editor of more than 130 published books, many of them dealing with surface contamination and cleaning. In 2002, the Kash Mittal Award was inaugurated for his extensive efforts and significant contributions to the field of colloid and interface chemistry. Among his numerous awards, Dr. Mittal was awarded the title honoris causa by the Maria Curie-Sklodowska University in Lubin, Poland in 2003. Currently, he is teaching and consulting in the areas of surface contamination and cleaning and in adhesion science and technology.

Introduction
Part 1: Fundamentals
The Physical Nature of Very, Very Small Particles and its Impact on their Behavior
Elucidating the Nature of Very Small Particles
Transport and Deposition of Aerosol Particles
Relevance of Particle Transport in Surface Deposition and Cleaning
Tribological Implications of Particles
Airborne Molecular Contamination
Engineering Aspects of Particle Adhesion and Removal
ESD Controls in Cleanroom Environments: Relevance to Particle Deposition
Part 2: Characterization of Surface Contaminants
Electron Microscopy Techniques for Imaging and Analysis of Nanoparticles
Surface Analysis Methods for Contaminant Identification
Ionic Contamination and Analytical Techniques for Ionic Contamination
Relevance of Colorimetric Interferometry for Thin Surface Film Contaminants
Wettability Techniques to Monitor the Cleanliness of Surfaces
Part 3: Methods for Removal of Surface Contamination
The Use of Surfactants to Enhance Particle Removal from Surfaces
Cleaning with Solvents
Removal of Particles by Chemical Cleaning
Cleaning Using High-Speed Impinging Jet
Microabrasive Precision Cleaning and Processing Technology
Precision Cleaning Using Microdroplet Beams
Cleaning Using Argon/Nitrogen Cryogenic Aerosols
Carbon Dioxide Snow Cleaning
Coatings for Preventing or Deactivation of Biological Contaminants
Detailed Study of Semiconductor Wafer Drying

Erscheint lt. Verlag 10.1.2008
Verlagsort Norwich
Sprache englisch
Maße 152 x 229 mm
Gewicht 1640 g
Themenwelt Naturwissenschaften Chemie Technische Chemie
Technik
ISBN-10 0-8155-1555-3 / 0815515553
ISBN-13 978-0-8155-1555-5 / 9780815515555
Zustand Neuware
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